Nonequilibrium Nondissipative Thermodynamics - and Its Application to Diamond Film Deposition

JT Wang
DOI: https://doi.org/10.1109/icsict.2001.982170
2002-01-01
Abstract:The equality of the 2(nd) law of thermodynamics had been regarded as the sufficient and necessary condition for a system being in equilibrium for about 150 years. However, such a classical or traditional basic concept should be overthrown or changed for complex systems including nonspontaneous reaction(s). Therefore, a new field of nonequilibrium nondissipative thermodynamics has been introduced by the author into a complete systematization of modem thermodynamics. Non-equilibrium nondissipative thermodynamics provides a solid theoretical base for quantitative calculation of nonequilibrium phase diagrams. A series of calculated nonequilibrium phase diagrams for activated low pressure diamond films deposition agree excellently with a great number of experimental data reported in the literature. Non-equilibrium nondissipative thermodynamics and the nonequilibrium phase diagram theorem can also be used for cubic boron nitride deposition and other solid-state and integrated circuit technology.
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