Abstract:Scanning Thermal Microscopy (SThM) uses micromachined thermal sensors integrated in a force sensing cantilever with a nanoscale tip can be highly useful for exploration of thermal management of nanoscale semiconductor devices. As well as mapping of surface properties of related materials. Whereas SThM is capable to image externally generated heat with nanoscale resolution, its ability to map and measure thermal conductivity of materials has been mainly limited to polymers or similar materials possessing low thermal conductivity in the range from 0.1 to 1 W/mK, with lateral resolution on the order of 1 \mum. In this paper we use linked experimental and theoretical approaches to analyse thermal performance and sensitivity of the micromachined SThM probes in order to expand their applicability to a broader range of nanostructures from polymers to semiconductors and metals. We develop physical models of interlinked thermal and electrical phenomena in these probes and then validate these models using experimental measurements of the real probes, which provided the basis for analysing SThM performance in exploration of nanostructures. Our study then highlights critical features of these probes, namely, the geometrical location of the thermal sensor with respect to the probe apex, thermal conductance of the probe to the support base, heat conduction to the surrounding gas, and the thermal conductivity of tip material adjacent to the apex. It is furthermore allows us to propose a novel design of the SThM probe that incorporates a carbon nanotube (CNT) or similar high thermal conductivity graphene sheet material positioned near the probe apex. The new sensor is predicted to provide spatial resolution to the thermal properties of nanostructures on the order of few tens of nm, as well as to expand the sensitivity of the SThM probe to materials with heat conductivity values up to 100-1000 W/mK.

Laser Nano-Engineering with the Assistance of Scanning Probe Microscope and Optical Resonance in Microparticles

Microscale Spatially Resolved Thermal Response of Si Nanotip to Laser Irradiation

Thermal Probing in Single Microparticle and Microfiber Induced Near-Field Laser Focusing

Nanofabrication mechanism of λ/20 features achieved by coupling field tip enhancement induced with nanosecond laser irradiating AFM probe tip

Fabrication of nanostructure on Au nano-film by nanosecond laser coupled with cantilevered scanning near-field optical microscopy probe

Electrochemical Preparation of STM Probes for High Aspect Ratio Nanometrology

Laser microstructuring of Si surfaces for low-threshold field-electron emission

Tip-enhanced Near-Field Raman Spectroscopy with a Scanning Tunneling Microscope and Side-Illumination Optics

Controllable fabrication of Sub-20nm structures with coupling field tip enhancement effect induced by nanosecond pulsed laser irradiation

Nanoscale Probing of Thermal, Stress, and Optical Fields under Near-Field Laser Heating

Ultrasonic resonance regulated near-field scanning optical microscope and laser induced near-field optical-force interaction

Study for Laser Controlled Fabrication of Micro/Nano-Structures of Silicon Based on Multi-Physics Model

Fdtd Simulation on Laser-Induced Enhancement of Electric Field in the Near-Field Apertureless Probe System

Laser-induced cantilever behaviour in apertureless scanning near-field optical microscopes

Optical Microscopy and Spectroscopy Beyond the Diffraction Limit

Tracking Electron Dynamics of Single Molecules in Scanning Tunneling Microscopy Junctions with Laser Pulses

Noncontact Sub-10 Nm Temperature Measurement in Near-Field Laser Heating

Nanoscale spatial resolution probes for Scanning Thermal Microscopy of solid state materials

Nanofabrication with the thermal AFM metallic tip irradiated by continuous laser

Understanding the Plasmonics of Nanostructured Atomic Force Microscopy Tips

Nanofabrication of the gold scanning probe for the STM-SECM coupling system with nanoscale spatial resolution