Resistivity measurements of nanorods formed by electron beam-induced deposition

masayuki shimojo,masaki takeguchi,renchao che,weiye zhang,masashi tanaka,kazutaka mitsuishi,kazuo furuya
DOI: https://doi.org/10.1109/IMNC.2005.203786
2005-01-01
Abstract:Insulators and conductors as well as semiconductors are necessary to make an electronic device. The electric properties of nanometer-sized structures or wires produced by EBID are, therefore, of importance for the application to nanodevices. In this paper, the resisitivity of nanorods produced by electron beam-induced deposition was measured.
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