Effects of Heat Treatment on Electric Properties of Nanorods Formed by Electron Beam-Induced Deposition

Masayuki Shimojo,Masaki Takeguchi,Renchao Che,Wei Zhang,Miyoko Tanaka,Kazutaka Mitsuishi,Kazuo Furuya
DOI: https://doi.org/10.1143/jjap.45.5509
2006-01-01
Abstract:Nanometer-sized rods were fabricated by an electron beam-induced deposition technique with iron pentacarbonyl. The electric properties of the as-deposited and heat-treated nanorods were measured in situ using a transmission electron microscope. The obtained current–voltage curve showed a nonlinear characteristic, and the resistivity was in the order of 10-2 Ω m in the case of the as-deposited nanorods. After a heat treatment at 600 °C in vacuum, the nanorods transformed to α-Fe, and a resistivity of approximately 10-6 Ω m and a metallic characteristic were obtained. This suggests that position- and shape-controlled metallic nanowires can be formed by electron beam-induced deposition combined with heat treatment.
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