Young's Modulus Measurement of Thin Film PZT

Jia Zhou,McMcollough, T.,Mantell, S.C.,Zurn, S.
DOI: https://doi.org/10.1109/ugim.1999.782843
1999-01-01
Abstract:In this paper, experimental measurements of the modulus for thin film PZT are presented. Several wafers with PZT patterned over Pt/Ti/SiO/sub 2/ were fabricated. In each wafer, circular membranes of diameters ranging from 668 /spl mu/m to 1667 /spl mu/m were constructed using reactive ion etching. Film moduli for the various material layers were found by measuring membrane deflection under a concentrated load. Layer thickness was verified using SEM. To account for the initial curvature in the membrane, the relationship between load, deflection and stiffness was approximated by a spherical shell model. These stiffness values provided the basis for predicting micro cantilever beam vibration behavior.
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