Structure and property of ferroelectric PbTiO3 thin films by thermal decomposition of metallo-organic compounds

Ren, Wei,Wu, Xiaoqing,Liangying Zhang,Yao, Xi
DOI: https://doi.org/10.1109/ISAF.1990.200350
1990-01-01
Abstract:The structure and properties of ferroelectric PbTiO3 thin films prepared by thermal decomposition of metallo-organic compounds were studied. PbTiO3 thin films annealed from 514°C to 700°C have a perovskite structure. The dielectric constant was 120. The tangent of the loss angle was less than 0.05 at 1 kHz. The films showed high resistivity (about 1012 Ω-cm). Spontaneous polarization and remanent polarization were 10.59 μC/cm2 and 8.96 μC/cm2 respectively
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