Abstract:This work proposes a liquid-metal-based calorimetric micro-flow sensor within a polydimethylsiloxane (PDMS) chip. It can measure the flow rate of fluid in microscale channels, with a range as low as several microliters per minute. This in-chip sensor is proposed to solve the issue of detecting the flow rate in microfluidic systems. To make the sensor compatible with PDMS microfluidic chips, low-melting-point gallium-based alloy and bismuth-based (bi-based) alloy are used to make the micro heater and bi-metal thermocouples, for these alloys can be easily injected into a PDMS chip to form electrodes. To minimize heat resistance (or temperature difference) between fluid and the detecting ends of thermocouples, these ends are directly exposed to liquid in the flow channel with the help of a special reversible bonding technology. Thermocouples are connected in parallel to improve the sensor's response. A novel method to bond and electrically connect the sensor to a PCB (print circuit board) is also elaborated. Since the calorimetric flow sensor is sensitive to heating power, fluid temperature and environment cooling, a dimensionless parameter less independent of these factors is deduced from heat transfer theory, and this idea is used in result processing to offset the bad effect. Experiments with pure water show that this sensor can be used to detect flow rates, with a resolution up to 4 μl/min/mV and a range of 12 μl/min in this case, and that at different heating powers, the thermal potential results vary significantly whereas the dimensionless results nearly keep the same. Present work indicates that this sensor has the potential to be integrated into a PDMS microfluidic system and to provide accurate and stable results if a dimensionless method is used in data processing.

Design And Simulation Of Pdms-Si Machined Micro-Liquid Flow Sensor

Design of Thermal Liquid Flow Microsensor

A liquid-metal-based microscale calorimetric in-chip flow sensor for flow rate measuring

Design and Manufacture of an Integrated Micro Flow Sensor with SU-8 Channel

Design and Simulation Study of Microfluidic Chip Based on the Liquid Quantitative Shunting Mixing and Detecting

Design and Simulation Analysis of Microscale Fluidic Flow Sensor

SIMULATION AND MICRO-PIV RESEARCH ON CLASSICAL MICROCHANNEL FLOW

Fabrication of the PDMS-Glass Microfluidic Chip with Integrated Electrodes

Fabrication of a Three-Layer PDMS Pneumatic Microfluidic Chip for Micro Liquid Sample Operation

Study on the Flow Field Distribution in Microfluidic Cells for Surface Plasmon Resonance Array Detection

Reasearch and fabrication of integrated pneumatic microvalves in polymer microfluidic chip

Principle and Application of Silicion Micromachined Fluid Sensor Based on MEMS

PDMS Microchannel Fabrication Technique Based on Microwire-Molding

Design and fabrication of a microfluidic detection chip

Multiscale Integrated Temperature/Flow Velocity Sensor Patches for Microfluidic Applications

Design and Fabrication of a MEMS Flow Sensor and Its Application in Precise Liquid Dispensing

Fabrication and Numerical Analysis of PDMS Micromixer on Microfluidic Chip

On-chip micro pressure sensor for microfluidic pressure monitoring

A Micro Flow Sensor for Volumetric Measurement of Conductive Fluids

Research and Fabrication of a Micro Flowmeter Based on PDMS

Simulation and optimization of a micro flow sensor