Theoretical Analysis of the Formation of Face-Centered Cubic Si Nanocrystals by Magnetron Sputtering

Shengliang Hu,Jingqi Zhang,Jinlong Yang,Jun Liu,Shirui Cao
DOI: https://doi.org/10.1063/1.3651485
IF: 4
2011-01-01
Applied Physics Letters
Abstract:To have a clear insight into the physical origin of the nucleation of face-centered cubic Si in the magnetron sputtering condition, a theoretical model was proposed by taking the capillary effect of the nanosized curvatures of the critical nucleus and the concave surface on the substrate into account. The calculation shows that the size and energy of the critical nucleation depend on the radius of the concave surface on the substrate and the temperature. Both the smaller radius of concave surface and the higher temperature are propitious to the formation of face-centered cubic Si nanocrystals.
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