Theory and Experimental Research of New Detection Technique for Interface Adhesion Strength

于斌斌,袁军堂,孙淮阳,吴笑天
IF: 1.8
2011-01-01
Materials Science and Technology
Abstract:Measurement and evaluation of interfacial adhesion strength is one of the key questions for development and applications of hard film technology.This paper presents a new detection method of pulsed-laser shock technique,based on analyzing the mechanism and mathematical model of film separation under the action of pulsed-laser shock.Taking the measurment of the adhesion strength of TiN film as an example,the surface was impacted by pulsed-laser at the range of 650~1000 mJ,the surface topography of impact points was observed by style microscope and scanning electron microscope,and the TiN film failure threshold was identified by the reflected signal detection.The experimental results suggest that the film/substrate interfacial adhesion strength was 4.954 GW/cm2,which proves that the technique is feasible.
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