Noncontact measurement of film-substrate interface strength by pulsed laser spallation technology

M Zhou,ZH Shen,YK Zhang,L Cai,XR Zhang
2001-01-01
Progress in Natural Science
Abstract:Recently, we measured the dynamic interface strength between film and substrate by using a modified laser spallation setup, and developped a novel diagnostic technology. A new spallation criteria of progressive damages at the interface between the film and the matrix is established based on the correlation analysis technology. We also suggest a new computer algorithm for estimating the dimension of damages (i.e. fracture), such as the width of delamination, the minimum size of delamination radius, and so on. The experiment results show that the dynamic interface strength of TiN/stainiess-steel is about 250 MPa. The detailed results, analyses and discussions will be presented in this paper.
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