Structural, Eelectronic and Optical Properties of Ultra-thin Hydrogenated Amorphous Germanium Films

LI Cong,XU Jun,LIN Tao,LI Wei,LI Shu-xin,CHEN Kun-ji
DOI: https://doi.org/10.3788/fgxb20113211.1165
2011-01-01
Chinese Journal of Luminescence
Abstract:Ultra-thin hydrogenated amorphous germanium films,with various thickness from 160 nm to 5 nm were grown by plasma enhanced chemical vapor deposition technique.The film structure was characterized by Raman spectroscopy,which exhibited a broad band centered around 280 cm-1 indicating their amorphous nature.The film thickness and optical properties were evaluated by ellipsometer spectroscopy.The measured thickness was well consistent with the pre-designed value and the optical band gap was about 1 eV which slightly increased with the decrease of film thickness.The temperature dependent conductivity of the films was measured.The electronic transport was believed to occur in the extended-states and the corresponding activation energy is about 0.3~0.4 eV.The light emission in infrared region from the films can be detected at low temperature.The sample for 160 nm had a broad luminescence band which can be divided into two sub-bands centered at 0.78 eV and 0.67 eV,respectively.By decreasing the films thickness less than 10 nm,the luminescence band beaome narrower and only a band at 0.8 eV was observed.It may be due to the relatively more hydrogen in the ultrathin films,which passivated the defect states and suppressed the defect-related luminescence.The non-radiative activation energy increased in ultrathin films suggesting the improved efficiency.
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