Copper-Induced Crystallization of Sputtered Silicon on Zno:Al Substrate and the Textured Interface for Light Trapping

Yong Zhao,Jian Wang,Qiang Hu,Dan Zhu,Dejie Li
DOI: https://doi.org/10.1016/j.apsusc.2011.06.084
IF: 6.7
2011-01-01
Applied Surface Science
Abstract:Copper-induced crystallization of a-Si on ZnO:Al (AZO) substrate is studied. On Ar sputtered AZO substrate, the optimized crystallite and crystalline ratio of poly-Si are ∼30nm and ∼71%, respectively. O2 is also introduced and optimized when preparing AZO substrates. On AZO substrate with O2/Ar+O2=3%, the crystallite and crystalline ratio of poly-Si are greatly improved, showing ∼40nm and ∼82%, respectively. Textured AZO is prepared for analyzing the light-trapping efficiency. With 40s etching in 0.5% HCl, ∼0.7μm lateral scale and ∼119nm root mean square roughness is obtained. The scattering property is verified by the flat step over a large angle range in the angular distribution measurement. 660nm Cu-induced poly-Si on this AZO substrate shows an average reflectivity of ∼17.7%, only 45% of the flat Si, showing a good light-trapping efficiency and a potential use in solar cells.
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