Abstract:Micro-electrical discharge machining (micro-EDM) is a good candidate for processing micro-hole arrays, which are critical features of micro-electro-mechanical systems (MEMS), diesel injector nozzles, inkjet printheads and turbine blades, etc. In this study, the wire vibration of the wire electro-discharge grinding (WEDG) system has been analyzed theoretically, and, accordingly, an improved WEDG method was developed to fabricate micron-scale diameter and high-aspect-ratio microelectrodes for the in-process micro-EDM of hole array with hole diameter smaller than 20 μm. The improved method has a new feature of a positioning device to address the wire vibration problem, and thus to enhance microelectrodes fabrication precision. Using this method, 14 μm diameter microelectrodes with less than 0.4 μm deviation and an aspect ratio of 142, which is the largest aspect ratio ever reported in the literature, were successfully fabricated. These microelectrodes were then used to in-process micro-EDM of hole array in stainless steel. The effects of applied voltage, current and pulse frequency on hole dimensional accuracy and microelectrode wear were investigated. The optimal processing parameters were selected using response–surface experiments. To improve machining accuracy, an in-process touch-measurement compensation strategy was applied to reduce the cumulative compensation error of the micro-EDM process. Using such a system, micro-hole array (2 × 80) with average entrance diameter 18.91 μm and average exit diameter 17.65 μm were produced in 50 μm thickness stainless steel sheets, and standard deviations of hole entrance and exit sides of 0.44 and 0.38 μm, respectively, were achieved.

Experimental Study of Micro-Electrode Array by Micro-Wedm

Microelectrode Array Fabrication by Micro-Wedm

Machining of Micro-electrode Array by WEDM

Experimental study on the influence of workpiece shape on discharge gap and burr in LS-WEDM and the preparation of microelectrode array with specific size

Experimental Study of Microelectrode Array and Micro-Hole Array Fabricated by Ultrasonic Enhanced Micro-EDM

Micro Electrochemical Machining of Array Micro-Grooves Using In-Situ Disk Electrode Fabricated by Micro-WEDM

A study on wire electrochemical micromachining for fabrication of microgrooves

Vibration Assisted Wire Electrochemical Micro Machining of Array Micro Tools

Fabrication of Microelectrode with Large Aspect Ratio and Precision Machining of Micro-Hole Array by Micro-Edm

Primary Study on Instantaneous Fabricating Mechanism of Tungsten Microelectrode Based on Single Discharge and Its Application

Research on the Combination Process of Micro-electrode Fabrication by Micro-EDM

Key Technology of Microelectrode Array Fabrication by Ultrasonic Enhanced Micro-EDM

Research On Micro Square Array Electrodes And Holes Combination Process by EDM and ECM

Analysis and Reduction of Process Energy Consumption and Thermal Deformation in a Micro-Structure Wire Electrode Electric Discharge Machining Thin-Wall Component

Study on the Preparation Process for High Accuracy Micro Machining by Wire Electrical Discharge Machining

Precision EDM of Micron-Scale Diameter Hole Array Using in-Process Wire Electro-Discharge Grinding High-Aspect-Ratio Microelectrodes

Wire electro-discharge grinding (WEDG) and its application

Experimental study of MWEDM technology

New Micro-Edm Reverse Copying Technology for Microelectrode Array Fabrication

Method of Microelectrode with Electrochemical Machining and Its Applications

Experimental Study on the Microelectrodes Fabrication Using Low Speed Wire Electrical Discharge Turning (LS-WEDT) Combined with Multiple Cutting Strategy