High Quality GaN-based LED Epitaxial Layers Grown in a Homemade MOCVD System

殷海波,王晓亮,冉军学,胡国新,张露,肖红领,李璟,李晋闽
DOI: https://doi.org/10.1088/1674-4926/32/3/033002
2011-01-01
Journal of Semiconductors
Abstract:>A homemade 7×2 inch MOCVD system is presented.With this system,high quality GaN epitaxial layers,InGaN/GaN multi-quantum wells and blue LED structural epitaxial layers have been successfully grown. The non-uniformity of undoped GaN epitaxial layers is as low as 2.86%.Using the LED structural epitaxial layers, blue LED chips with area of 350×350μm 2 were fabricated.Under 20 mA injection current,the optical output power of the blue LED is 8.62 mW.
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