Abstract:Conventional and modified sol–gel processes were used to deposit PZT films with different thicknesses and Zr:Ti ratio on Pt/Ti/SiO2/Si substrates. The crystalline structure and growth behavior of the films have been studied by X-ray diffraction, scanning electron microscopy, and Auger electron spectroscopy. The ferroelectric polarization–electric (P–E) hysteresis loops of the films was also measured and discussed. The structure of piezoelectric element is as (Au or Pt/Ti)/PZT/Pt/Ti multilayer film. Meanwhile, it has a relatively flat surface and each layer exhibits a very dense, uniform, sharp interface. According to the results of P–E hysteresis loops, for given PZT film, the polarization and coercive electric field increase with applied voltage increasing. Furthermore, a new piezoelectric micro-actuator including two PZT elements and a U-type stainless steel substrate for positioning a magnetic head in a high-density hard disc device has been fabricated and investigated. The micro-actuator was also tested in order to investigate the driving mechanics. The results show that the peak-to-peak head displacement of 1.146 μm is achieved when an alternating voltage of ±20 V is applied on a U-type micro-actuator bonding with two 3 μm thick PZT elements and experimental frequency response of the micro-actuator with HSA higher than 22 kHz, yielding the required servo bandwidth (13 kHz).

Processing and magneto-electric properties of sol–gel-derived Pb(Zr 0.52 Ti 0.48 )O 3 –Ni 0.8 Zn 0.2 Fe 2 O 4 2-2 type multilayered films

Ferroelectric and Ferromagnetic Behavior of Pb(Zr0.52Ti0.48)O3–Co0.9Zn0.1Fe2O4 Multilayered Thin Films Prepared Via Solution Processing

Electric and Magnetic Properties of Cofe2o4-Pbzr0.5ti0.5o3 Composite Thin Films

Mechanism of Doping-Induced Orientation of Magnetic Phase in a Sol–Gel-Derived Ni0.5Zn0.5Fe2O4/BaTiO3 Multiferroic Thin Film with High Magnetoelectric Coupling

Magnetic field induced ferroelectric and dielectric properties in Pb(Zr0.5Ti0.5)O3 films containing Fe3O4 nanoparticles

Preparation and Ferroelectric Properties of PZT Multilayer Film

The Ferroelectric and Antiferroelectric Behavior of Pbtio3/Pbzro3-Multilayered Thin Films

Processing and Thickness Effects on the Microstructure and Electrical Properties of Sol–gel Deposited Pb(Zr, Ti)O3 Films

Multiferroic Pb(Zr0.52ti0.48)O-3-Co0.9zn0.1fe2o4 Bilayer Thin Films Via A Solution Processing

Magnetoelectric Cofe2o4-Lead Zirconate Titanate Thick Films Prepared By A Polyvinylpyrrolidone-Assisted Sol-Gel Method

Orientation-dependent Multiferroic Properties in Pb(Zr0.52Ti0.48)O3–CoFe2O4 Nanocomposite Thin Films Derived by a Sol-Gel Processing

Synthesis and electrical properties of Pb(Zr 0.52 Ti 0.48 )O 3 thick films embedded with ZnO nanoneedles prepared by the hybrid sol–gel method

Magnetoelectric CoFe2O4–Pb(Zr,Ti)O3 Composite Thin Films Derived by a Sol-Gel Process

Fabrication and electrical properties of lead zirconate titanate thick films using a new sol-gel processing technique

Fabrication and electrical properties of lead zirconate titanate thick films by the new sol–gel method

Thickness-dependent Electrical Properties of Sol–gel Derived Pb(Zr 0.52 Ti 0.48 )O 3 Thick Films Using PbTiO 3 Buffer Layers

Microstructure and Properties of Sol–gel Derived PbTiO3/NiFe2O4 Multiferroic Composite Thin Film with the Two Nano-Crystalline Phases Dispersed Homogeneously

Enhancement of Energy-Storage Density in PZT/PZO-Based Multilayer Ferroelectric Thin Films

High Performances Corrugated Feed Horns for Space Applications at Millimetre Wavelengths

Optimizing Direct Magnetoelectric Coupling in Pb(Zr,Ti)O3/Ni Multiferroic Film Heterostructures

Structural, Ferroelectric, Dielectric, and Magnetic Properties of BiFeO3∕Pb(Zr0.5,Ti0.5)O3 Multilayer Films Derived by Chemical Solution Deposition