Abstract:Among the many ferroelectric film fabrication techniques, the sol-gel process provides high purity, large deposition area and easy composition control. However, the thickness limit of a crack-free single-layer film is about 0.2 mum and about 10 times of coating and thermal treatment processing are needed to deposit 1.5 mum-thick films. In laser ablation, the deposition rate is expected to be 1-2 mum/h, but the film quality is lower than that deposited by the sol-gel method. In this work, the hybrid process, involving the sol-gel method and laser ablation, was used to make 1.65 mum-thick lead zirconate titanate (PZT) films with well-crystallized perovskite phase at the (111) orientation. We deposited (111)-oriented 0.15 mum-thick PZT film on Pt/Ti/SiO2/Si substrates using the sol-gel method and then deposited 1.5 mum-thick PZT films by laser ablation. The remanent polarization of 28.6 muC/cm(2) and the coercive field of 58.0 kV/cm were obtained while the dielectric constant and loss values measured at 1 kHz were approximately 1050 and 0.045, respectively. The piezoelectric coefficient d(31) was also investigated and found to be 16.65 +/- 4 pC/N. In the application, a micromirror actuated by the hybrid PZT films was designed and fabricated successfully by a three-mask lithography process. The scanning angle of 6 2 degrees was demonstrated, while resonating with 5 V-p.p at the resonance frequency (1975 Hz).

Fabrication and electrical properties of lead zirconate titanate thick films using a new sol-gel processing technique

Fabrication and electrical properties of lead zirconate titanate thick films by the new sol–gel method

Enhanced electrical properties of Pb(Zr0.80Ti0.20)O3 thick films prepared by a modified sol–gel technique

PZT THICK FILMS FABRICATION USING A SOL-GEL BASED 0-3 COMPOSITE PROCESSING

Preparation and Ferroelectric Properties of Double-Scale PZT Composite Piezoelectric Thick Film

Fabrication and Characterization of Sol–Gel Derived (100)‐textured (pb0.97la0.02)(zr0.95ti0.05)o3 Thin Films

Preparation and Application of Lead Zirconate Titanate (PZT) Films Deposited by Hybrid Process: Sol-Gel Method and Laser Ablation

Thickness-dependent Electrical Properties of Sol–gel Derived Pb(Zr 0.52 Ti 0.48 )O 3 Thick Films Using PbTiO 3 Buffer Layers

Electrical and Mechanical Properties of PZT Thin Films Prepared by Hybrid Process of Sol-Gel Technique and Laser Ablation

Thickness Effect on Electrical Properties of Pb(Zr0.52Ti0.48)O3 Thick Films Embedded with ZnO Nanowhiskers Prepared by a Hybrid Sol–gel Route

Sol Gel Derived Pzt Thin Films For Mems Applications

Precursor-Monomer Method of Sol-Gel for Fabrication Pt/Pzt/Pt Ferroelectric Films

Fabrication of PZT Thick Film by Two Spin-Coating Methods Based on Sol-Gel

Effect of thickness on microstructure and electrical properties of PZT films prepared by a modified Sol-Gel method

STUDY ON A NEW AND RAPID HEAT-TREATMENT PROCESS FOR FABRICATING LEAD ZIRCONATE TITANATE THIN FILM

Enhanced Dielectric and Piezoelectric Properties of RF Sputtered Pb(Zr0.60,Ti0.40)O3 Thin Films Deposited on Sol-Gel Derived Pb1+x(Zr0.40,Ti0.60)O3 Seed Layer with Various Lead Contents

Synthesis and electrical properties of Pb(Zr 0.52 Ti 0.48 )O 3 thick films embedded with ZnO nanoneedles prepared by the hybrid sol–gel method

Growth and ferroelectric properties of sol-gel derived Pb(Zr,Ti)O3 using inorganic zirconium precursor

Processing and Characterization of Pb(Zr,Ti)O3 Thick Films on Platinum-Coated Silicon Substrate Derived from Sol–gel Deposition

Growth and Characterization of Lead Zirconate Titanate (PZT) Thin Films

Thickness effects on structures and electrical properties of lead zirconate titanate thick films