All-Inorganic Flexible Ba0.67Sr0.33TiO3 Thin Films with Excellent Dielectric Properties over a Wide Range of Frequencies
Dong Gao,Zhengwei Tan,Zhen Fan,Min Guo,Zhipeng Hou,Deyang Chen,Minghui Qin,Min Zeng,Guofu Zhou,Xingsen Gao,Xubing Lu,Jun-Ming Liu
DOI: https://doi.org/10.1021/acsami.9b08712
IF: 9.5
2019-01-01
ACS Applied Materials & Interfaces
Abstract:With rapid advances in flexible electronics and communication devices, flexible dielectric capacitors exhibiting high permittivity, low loss, and large electric-field tunability over a wide frequency range have attracted increasing attention. Here, a large-scale Ba0.67Sr0.33TiO3 (BST) dielectric thin film sandwiched between SrRuO3 (SRO) bottom electrode and Pt top electrode is fabricated on a flexible mica substrate. The mica/SRO/BST/Pt capacitor exhibits a dielectric constant (epsilon(')(r)) of more than 1200, a loss tangent [tan(delta)] as low as 0.16, and a tunability of 67% at low frequencies around 10 kHz. Simultaneously, the capacitor can retain an epsilon(')(r) of 540 and a tan(delta) of 0.07 at microwave frequencies, e.g., 18.6 GHz. Moreover, even when the capacitor is bent to a small radius of 5 mm or undergoes 12 000 bending cycles (at 5 mm radius), almost no deterioration in epsilon(')(r), tan(delta), and tunability is observed. The excellent dielectricity and mechanical flexibility and durability endow the mica/SRO/BST/Pt capacitor with huge potential for flexible electronic and microwave applications.