An 8 Mb Phase Change Random Access Memory Based on 0.13 Μm Technology

CAI Daolin,CHEN Houpeng,WANG Qian,DING Sheng,FU Cong,CHEN Yifeng,HONG Xiao,LI Xi,CHEN Xiaogang,LIU Bo,SONG Zhitang,FENG Songlin
DOI: https://doi.org/10.3969/j.issn.1000-3819.2011.06.017
2011-01-01
Abstract:An 8 Mb phase change random access memory is developed in a 0.13 μm 4-ML standard CMOS technology.The storage element is integrated using 3 additional masks with respect to process baseline.The cell selector is implemented by a standard 1.2 V NMOS device,achieving a cell size of 50 F2.3.3 V CMOS devices are used for the peripheral circuit.The current of the Set operation and the Reset operation is 0.4 mA and 2 mA,respectively.10 μA current offers to readout operation.The endurance characteristics is measured to be over 108.
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