Optimal Design of Phase Change Random Access Memory Based on 130nm Cmos Technology

Daolin Cai,Houpeng Chen,Qian Wang,Xiao Hong,Yifeng Chen,Linhai Xu,Xi Li,Zhaomin Wang,Yiyun Zhang,Zhitang Song
DOI: https://doi.org/10.1117/12.2016907
2013-01-01
Abstract:An 8Mb phase change random access memory (PCRAM) has been developed by a 130nm 4-ML standard CMOS technology based on the Resistor-on-Via-stacked-Plug (RVP) storage cell structure. This phase change resistor is formed after CMOS logic fabrication. PCRAM can be embedded without changing any logic device and process. The memory cell selector is implemented by a standard 1.2V NMOS device. Aimed at the resistance distributions, lowering the operation current and improving the bit yield, some methods are used to optimize the design of the chip.
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