Abstract:In order to predict the noise performance of a digital capacitive MEMS accelerometer and optimize the parameters of circuits, an improved quantization noise model is presented in this paper. Considering the distortion produced by the nonlinear characteristic of a quantizer, a system model of the Sigma-Delta (ΣΔ) accelerometer is established on the basis of describing function method model of a 1-bit quantizer. On the basis of this model, the formula of quantization noise before noise shaping, the transfer function of quantization noise and its expression in the signal band are presented. The model of quantization noise proposed in this paper includes the influence of sensing element parameters and the high non-linearity of a 1-bit quantizer. DC and AC simulation results show that the model can forecast the quantization noise in the signal band more accurately, compared with the models based on linear and quasi-linear model of a quantizer. The influences of electronic noise and sampling frequency on quantization noise are also analyzed. The results show that in ΣΔ MEMS accelerometer, electronic noise will lead to a reduction of the quantization gain and impact the noise shaping ability seriously. Increasing sampling frequency cannot effectively reduce the output quantization noise, but it will decline with sampling frequency at the slope of −3dB/oct.

Analysis of sigma-delta micro-mechanical accelerometer's parameters

Analysis of the Frequency-Dependent Vibration Rectification Error in Area-Variation-Based Capacitive MEMS Accelerometers.

Noise Analysis and Parameter Optimization of Digital MEMS Accelerometer System

A High-Performance Closed-Loop Fourth-Order Sigma-Delta Micro-Machined Accelerometer

A Low-power High-resolution Band-pass Sigma-delta ADC for Accelerometer Applications

Nonlinearity Analysis of Closed-Loop ΣΔ Micro-Mechanical Accelerometer

A High-Performance Fourth-Order Sigma-Delta Micromachined Accelerometer

Stability Analysis in High-Order Electromechanical Sigma-Delta Accelerometer

Model Building of Nonideal Factors in Sigma-Delta Accelerometer and System Level Design

Modeling Analysis and Simulation of Resonant Accelerometer

Design of a six-beam four-order delta-sigma micro-accelerometer

Modeling and Analysis of a Closed-Loop System for High-Q MEMS Accelerometer Sensor

Analysis and optimization on nonlinearity of large-range closed-loop MEMS accelerometer

System Design of Nonideal Fourth-Order Sigma-Delta Micromachined Accelerometer

A sigma-delta interface built-in self-test and calibration for microelectromechanical system accelerometer's utilizing interpolation method

System Design of Second-Order Sigma-Delta Micromachined Accelerometer

Study Of Closed-Loop High-Resolution Sigma-Delta For A Mems Accelerometer

Analysis and Optimization on Dynamic Characteristics and Important Parameters of Force Feedback Accelerometer

Quantization noise consideration and characterization in Sigma-Delta MEMS accelerometer.

Design and Noise Analysis of A Sigma-Delta Capacitive Micromachined Accelerometer

Influence of Q value on accelerometer quantization noise