Abstract:Heterogeneous element doping in amorphous carbon films can reduce residual stresses and improve plastic deformation. Nevertheless, the effects of dopant content and size on the metastable transition mechanism between sp2-C and sp3-C atoms during the deformation process are unclear and difficult to be in situ observed and researched, experimentally. In this work, the mechanical properties and the structural evolution during the nanoindentation of amorphous CoCrFeNi sphere-doped carbon heterostructured films with different radii were simulated. The results indicate that the hardness H and elastic modulus E of the films decreased with the increase of the dopant addition. H decreases from 50.69 to 28.94 GPa, and E decreases from 664.39 to 448.62 GPa. The decrease in the elastic recovery and the enlargement of the shear transition zones indicate that the presence of the amorphous CoCrFeNi dopant can significantly improve the plastic deformation capacity of the films. During the nanoindentation process, the spherical dopants reduce the stress and shear strain of the regions under the indenter in a-C films. The reduction of compressive and shear stresses in the film can inhibit the C atom metastable transition from sp2-C to sp3-C. This can provide a theoretical basis for the development and design of heavy-load and high-deformation-rate a-C films.

The Effect of Stress Relaxation on the Microstructure and Hardness Evolution of Pure Amorphous‐Carbon and C/Ti Multilayer Films

Effects of Applying Stress on the Electron Field Emission Properties in Amorphous Carbon Thin Films

Study on the Mechanism and Measurement of Stress of Tio2 and Sio2 Thin-Films

Stress, mechanical and adhesion properties of multilayer tetrahedral amorphous carbon films

Stress, Microstructure and Mechanical Properties of Graded Multilayer Tetrahedral Amorphous Carbon Films

Effects of Ti Content on Microstructure, Mechanical and Tribological Properties of Ti-doped Amorphous Carbon Multilayer Films

Interface defects and stress relief of super hard Ti+C/a-CN x gradient multilayer films

Preparation and Tribological Properties of Amorphous Ti/C Multilayers by Pulsed Laser Deposition

Film thickness effect on texture and residual stress sign transition in sputtered TiN thin films

Residual Stress Relief of Hard A-C Films Though Buckling

Effects of film thickness on mechanical properties of tetrahedral amorphous carbon

The Electrochemical and Mechanical Properties of Ti Incorporated Amorphous Carbon Films in Hanks' Solution

Influence of film thickness on intrinsic growth stress and Raman evaluation of tetrahedral amorphous carbon films

Stress Evolution of Tetrahedral Amorphous Carbon Upon Boron Incorporation

Molecular Dynamics Investigation of Metastable Structure and Hybridization Bond Evolution in High-Entropy CoCrFeNi Heterostructured Amorphous Carbon Films

Microstructure and Tribological Properties of Ti-contained Amorphous Carbon Film Deposited by DC Magnetron Sputtering

Effects and Modulation Mechanism of Crystal Structure on Residual Stress of Cu Films Used for Metallization

Thermal Effects Of Residual Macrostress And Microstrain In Plasma-Assisted Cvd Tin Films

Thickness Dependence of Internal Stress in DLC Films

Structure, stability and stress properties of amorphous and nanostructured carbon films

Structure of Sp(2) Dominant A-C Film with Superhardness