Stress Evolution of Tetrahedral Amorphous Carbon Upon Boron Incorporation

Manlin Tan,Jiaqi Zhu,Jiecai Han,Xiao Han,Li Niu,Wangshou Chen
DOI: https://doi.org/10.1016/j.scriptamat.2007.03.036
IF: 6.302
2007-01-01
Scripta Materialia
Abstract:This paper reports the evolutions of stress and mechanical properties of tetrahedral amorphous carbon films upon boron incorporation. A sharp stress relief and slight density reduction combined with moderate hardness and Young's modulus were observed for the films with boron concentration up to 15% in the cathodes. Raman spectroscopy shows that a clustering of sp(2) sites without a notable decrease in spa content occurs in the films, which is responsible for the mechanical behavior after boron incorporation. (C) 2007 Acta Materialia Inc. Published by Elsevier Ltd. All rights reserved.
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