Development of Humidity Sensor with Quartz Crystal Microbalance Coated with Polyethyleneimine

李先懿,莫晓亮,陈国荣
DOI: https://doi.org/10.3969/j.issn.1672-7126.2010.04.04
2010-01-01
Abstract:A novel type of humidity sensor was developed based on the quartz crystal microb alance coated with Polyethyleneimine (PEI). Its various aspects, such as its relative humidity (RH) response characteristics, its sensitivity, its cyclic char acteristics at a fairly high relative humidity contrast, and its long-term aging performance, were experimentally evaluated. The results show that the PEI coated humidity sensor works pretty well in a wide range of humidity. In addition, as the relative humidity varies from 11% to 95%, its frequency shift is 2,000 Hz, and at an abrupt change in the relative humidity, the response and recover times of the sensor were found to be about 30 and 20 s, respectively. The many strengths of the newly-developed sensor include high sensitivity, good reproducibility, and sati sfactory stability in cycling and aging tests.
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