Abstract:In the present paper the humidity sensing properties of regioregular rr-P3HT (poly-3-hexylthiophene) polymer films is investigated by means of surface acoustic wave (SAW) based sensors implemented on LiNbO3 (1280 Y-X) and ST-quartz piezoelectric substrates. The polymeric layers were deposited along the SAW propagation path by spray coating method and the layers thickness was measured by atomic force microscopy (AFM) technique. The response of the SAW devices to relative humidity (rh) changes in the range ~5–60% has been investigated by measuring the SAW phase and frequency changes induced by the (rh) absorption in the rr-P3HT layer. The SAW sensor implemented onto LiNbO3 showed improved performance as the thickness of the membrane increases (from 40 to 240 nm): for 240 nm thick polymeric membrane a phase shift of about −1.2 deg and −8.2 deg was measured for the fundamental (~78 MHz operating frequency) and 3rd (~234 MHz) harmonic wave at (rh) = 60%. A thick rr-P3HT film (~600 nm) was deposited onto the quartz-based SAW sensor: the sensor showed a linear frequency shift of ~−20.5 Hz per unit (rh) changes in the ~5–~50% rh range, and a quite fast response (~5 s) even at low humidity level (~5% rh). The LiNbO3 and quartz-based sensors response was assessed by using a dual delay line system to reduce unwanted common mode signals. The simple and cheap spray coating technology for the rr-P3HT polymer films deposition, complemented with fast low level humidity detection of the tested SAW sensors (much faster than the commercially available Michell SF-52 device), highlight their potential in a low-medium range humidity sensing application.

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