Scratch Behavior of DLC Film Deposited by Plasma Based Ion Implantation & Deposition

LUO Jian-jun,SUN Zhi-guo,MA Lin,TANG Guang-ze
DOI: https://doi.org/10.13251/j.issn.0254-6051.2010.08.025
2010-01-01
Abstract:Diamond-like carbon(DLC)film was deposited on mintage mould steel by plasma based ion implantation deposition with feeding gas of C2H2 and H2.The binding force and corresponding change law between DLC films and steel substrate with various parameters were studied by scratch method.The results show that the critical load of DLC films increases with increase of implantation current and reduce of pulsed voltage.With increase of C2H2/H2 ratio and working pressure,the critical load increase at first,then decrease.The peeling-off mechanism of DLC films from substrate also was discussed based on SEM observation.The results indicate that a delamination between DLC film and substrate firstly occurs during scratch test,and then a crack of film happens under vertial load.
What problem does this paper attempt to address?