Estimation of measurement uncertainty of line edge roughness based on the next generation GPS

Jiang Zhuangde,Zhao Fengxia,Jing Weixuan,Wang Chenying,Philip D. Prewett,Kyle Jiang
2010-01-01
Abstract:In this paper Scanning Electron Microscopy (SEM) measurement uncertainty of line edge roughness (LER) is studied based on new Geometrical Product Specifications (GPS). With the operation and operator theories of the new GPS, the verification operator of LER which mainly include extraction operation, edge detection operation and association operation are proposed. According to the GPS uncertainty theories the effect of SEM image noise, sampling length and association criteria on LER measurement results were analyzed, the calculation formulas for uncertainty propagation of key feature operations in operator are put forward, and an algorithm to estimate LER uncertainty based on SEM image is also discussed.
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