Analysis of Long-Distance Geometric Error Measurement and Uncertainty Based on PSD Laser Collimation Principle

Yinbao Cheng,Penghuang Luo,Bin Shen,Yinghui Wang,Yaru Li,Shaohui Li

DOI: https://doi.org/10.3390/photonics11060538

IF: 2.536

2024-06-05

Photonics

Abstract:Due to the limitations of traditional geometric error measurement, the measurement accuracy of long-stroke geometric errors is generally not high and the operation is complicated. In response to the above situation, in this study, a geometric error measurement system is built with a laser beam as the reference line and 2D position sensitive detector as the photoelectric conversion device. The single measurement range is 40 m, and the measurement range is further expanded through the principle of segmented splicing. Using an ultra-long guide rail as the measurement object for straightness measurement, the experimental results are similar to those of a laser interferometer. The uncertainty analysis model was obtained through the analysis of quantity characteristics, and based on this, the variance synthesis theorem and probability distribution propagation principle were studied to form two uncertainty synthesis methods. The measurement evaluation results showed that the two methods were basically consistent. The work provided a reference method for the uncertainty evaluation of position-sensitive detector measurement systems in the future.

optics

What problem does this paper attempt to address?

The paper attempts to address the issue of low accuracy and complex operation of traditional geometric error measurement methods in long-range measurements. Specifically, traditional measurement tools such as laser interferometers and coordinate measuring machines, although having high measurement accuracy, have drawbacks such as high equipment costs, low measurement efficiency, sensitivity to environmental conditions, and limited measurement range. Therefore, this study proposes a long-distance geometric error measurement system based on a Position Sensitive Detector (PSD) and a semiconductor laser emitter, aiming to overcome the aforementioned problems.

### Main Research Content:
1. **Measurement System Design**:
- A measurement system was constructed using a laser beam as a reference line and a 2D Position Sensitive Detector (PSD) as a photoelectric conversion device.
- The single measurement range can reach 40 meters, and the measurement range is further extended through the principle of segment stitching.

2. **Measurement Principle**:
- Based on the PSD laser collimation principle, the laser beam is projected onto the photosensitive surface of the PSD, with the laser beam serving as the reference line for measurement.
- As the PSD moves along the surface of the measured object, the geometric error of the measured surface causes relative displacement between the laser beam and the PSD photosensitive surface, thereby changing the position of the light spot.
- Through the working principle of the PSD, precise information on the change in the position of the light spot can be obtained.

3. **Uncertainty Analysis**:
- An uncertainty analysis model was established through the analysis of the characteristics of the measured values.
- Two methods for uncertainty synthesis were proposed based on the variance synthesis theorem and the principle of probability distribution propagation.

4. **Experimental Verification**:
- The reliability and accuracy of the system were verified by measuring the straightness of a 45-meter ultra-long guide rail.
- The main sources of uncertainty in the system were determined through statistical methods, and an uncertainty evaluation and analysis model was established.

### Research Significance:
This study provides a new long-distance geometric error measurement technology that not only has high measurement accuracy but is also easy to operate and low in cost. It is suitable for fields such as aerospace, precision instruments, and micromechanics. Additionally, through uncertainty analysis, it provides a reference method for the uncertainty evaluation of future PSD-based measurement systems.