Silicon Nanophotonic Devices Based on Periodic Structures

Z. Zhou,D. S. Citrin,H. Wu,H. Yi,J. Hou,R. Hao,E. Cassan,X. Wang

DOI: https://doi.org/10.1109/group4.2010.5643439

2010-01-01

Abstract:Periodic structures have been used extensively in optics and photonics. This paper is to report our work on manipulating optical propagation in the nanophotonics domain using silicon devices based on periodic structures.

What problem does this paper attempt to address?

Multiple-Patterning Nanosphere Lithography for Fabricating Periodic Three-Dimensional Hierarchical Nanostructures.

Xiaobin Xu,Qing Yang,Natcha Wattanatorn,Chuanzhen Zhao,Naihao Chiang,Steven J. Jonas,Paul S. Weiss

DOI: https://doi.org/10.1021/acsnano.7b05472

IF: 17.1

2017-01-01

ACS Nano

Abstract:While three-dimensional (3D) configurable hierarchical nanostructures have wide ranging applications in electronics, biology, and optics, finding scalable approaches remains a challenge. We report a robust and general strategy called multiple-patterning nanosphere lithography (MP-NSL) for the fabrication of periodic 3D hierarchical nanostructures in a highly scalable and tunable manner. This nanofabrication technique exploits the selected and repeated etching of polymer nanospheres that serve as resists and that can be shaped in parallel for each processing step. The application of MP-NSL enables the fabrication of periodic, vertically aligned Si nanotubes at the wafer scale with nanometer-scale control in three dimensions including outer/inner diameters, heights/hole-depths, and pitches. The MP-NSL method was utilized to construct 3D periodic hierarchical hybrid nanostructures such as multilevel solid/hollow nanotowers where the height and diameter of each level of each structure can be configured precisely as well as 3D concentric plasmonic nanodisk/nanorings with tunable optical properties on a variety of substrates.
Silicon Nanophotonic Devices Based on Resonance Enhancement

Zhiping Zhou,Huaming Wu,Junbo Feng,Jin Hou,Huaxiang Yi,Xingjun Wang

DOI: https://doi.org/10.1117/1.3527260

IF: 1.179

2010-01-01

Journal of Nanophotonics

Abstract:In recent years, silicon nanophotonic devices have attracted more and more attention due to their compactness, low power consumption, and easy integration with other functions. In addition to the higher index of silicon material providing stronger light confinement, the optical resonance associated with the novel structure design also enhances the performance of nanophotonic devices and offers stronger light-matter interaction. Silicon nanophotonic devices such as polarization beamsplitters, mirrors and reflectors, slow light waveguides, and microring sensors are studied, and all of them demonstrate much better performances due to the incorporated optical resonance enhancement.
Silicon-Based Optoelectronics Enhanced by Hybrid Plasmon Polaritons: Bridging Dielectric Photonics and Nanoplasmonics

Pengfei Sun,Pengfei Xu,Kejian Zhu,Zhiping Zhou

DOI: https://doi.org/10.3390/photonics8110482

IF: 2.536

2021-01-01

Photonics

Abstract:Silicon-based optoelectronics large-scale integrated circuits have been of interest to the world in recent decades due to the need for higher complexity, larger link capacity, and lower cost. Surface plasmons are electromagnetic waves that propagate along the interface between a conductor and a dielectric, which can be confined several orders smaller than the wavelength in a vacuum and offers the potential for minimizing photonic circuits to the nanoscale. However, plasmonic waveguides are usually accompanied by substantial propagation loss because metals always exhibit significant resistive heating losses when interacting with light. Therefore, it is better to couple silicon-based optoelectronics and plasmonics and bridge the gap between micro-photonics and nanodevices, especially some nano-electronic devices. In this review, we discuss methods to enhance silicon-based optoelectronics by hybrid plasmon polaritons and summarize some recently reported designs. It is believed that by utilizing the strong light confinement of plasmonics, we can overcome the conventional diffraction limit of light and further improve the integration of optoelectronic circuits.
Silicon-based CMOS Photonic Devices Using Carrier Dispersion Effect

赵勇,江晓清,杨建义,王明华

2009-01-01

Abstract:In order to realize the practical application of the Silicon-based optoelectronic devices, the progress and characteristics of Silicon-based CMOS photonic devices using carrier dispersion effect with structures of P-I-N, Bipolar Mode Field Effect Transistor(BMFET), Metal Oxide Semiconductor(MOS) and PN junction are reviewed. And our work in design and fabrication of Silicon-based CMOS photonic devices is reported. The devices fabricated by commercial CMOS process have expected results. The extinction ratios of an optical modulator, a 1 × 2 optical switch and a ring resonator are about 18 dB, 21 dB and 8~12 dB, respectively. The introduction of CMOS technology to the design and fabrication of Silicon-based photonic devices will make integrated optics be on a new level.
Silicon Photonic Network-on-chip and Enabling Components

Ting Hu,Chen Qiu,Ping Yu,LongZhi Yang,WanJun Wang,XiaoQing Jiang,Mei Yang,Lei Zhang,JianYi Yang

DOI: https://doi.org/10.1007/s11431-012-5112-2

2013-01-01

Abstract:As the transistor’s feature scales down and the integration density of the monolithic circuit increases continuously,the traditional metal interconnects face significant performance limitation to meet the stringent demands of high-speed,low-power and low-latency data transmission for on-and off-chip communications.Optical technology is poised to resolve these problems.Due to the complementary metal-oxide-semiconductor（CMOS） compatible process,silicon photonics is the leading candidate technology.Silicon photonic devices and networks have been improved dramatically in recent years,with a notable increase in bandwidth from the megahertz to the multi-gigahertz regime in just over half a decade.This paper reviews the recent developments in silicon photonics for optical interconnects and summarizes the work of our laboratory in this research field.
Subwavelength Engineering in Silicon Photonic Devices

Wen Zhou,Zhenzhou Cheng,Xia Chen,Ke Xu,Xiankai Sun,HonKi Tsang

DOI: https://doi.org/10.1109/jstqe.2019.2899757

IF: 4.9

2019-01-01

IEEE Journal of Selected Topics in Quantum Electronics

Abstract:In the past decade, there has been tremendous progress in using subwavelength-scale nanostructures with elaborately designed periodic and disordered photonic materials for applications in integrated photonics. In this paper, we review the advances in subwavelength engineering used in silicon photonic devices, with an emphasis on our own contributions on the use of subwavelength gratings and hyperuniform disordered photonic structures to attain state-of-the-art performances for near- and mid-infrared applications in fiber-chip coupling, slot waveguides for refractive-index sensing, mode conversion, wavelength filtering, integrated resonators, and ultracompact high-extinction and broadband integrated polarizers.
Development of Silicon Photonic Devices for Optical Interconnects

Xi Xiao,ZhiYong Li,Tao Chu,Hao Xu,XianYao Li,Anastasia Nemkova,Xiong Kang,YuDe Yu,JinZhong Yu

DOI: https://doi.org/10.1007/s11431-012-5120-2

2013-01-01

Science China Technological Sciences

Abstract:Silicon photonic devices based on complementary-metal-oxide-semiconductor (CMOS) compatible technologies have shown attractive performances on very-large-scale monolithic optoelectronic integration, high speed modulation and switching, and efficient off-chip optical coupling. This paper presents the recent progress on fast silicon optical modulation, wavelength-insensitive optical switching and efficient optical coupling techniques in our group. Several CMOS-compatible silicon optical couplers with different structures have been developed, showing the highest coupling efficiency of 65%. Broadband silicon-based optical switches with sub-nanosecond switching on-off time are experimentally realized. Silicon modulators with novel PN junctions are demonstrated with the speed up to 50 Gb s −1 .
Silicon Nanophotonics for Light Manipulation.

Daoxin Dai,Jiang Li,Dajian Liu,Yaocheng Shi

DOI: https://doi.org/10.23919/ps.2019.8818040

2019-01-01

Abstract:In this paper, a review is given on recent progresses of silicon nanophotonic devices for on-chip light manipulation, including the static type and the dynamic type.
Study of Silicon Photonics Based on Standard CMOS Foundry

Jianyi Yang,Yong Zhao,Chen Qiu,Wanjun Wang,Guomin Jiang,Yinlei Hao,Xiaoqing Jiang

DOI: https://doi.org/10.1117/12.870406

2010-01-01

Abstract:Silicon photonics can found applications in optical interconnects and optical signal processing. Recent years, silicon photonics was developed rapidly. In this paper, we report our research work on silicon photonics. Based on the standard CMOS foundry, we studied the silicon waveguides and related photonic components.
Silicon-based Heterostructures for Optoelectronic Synaptic Devices

Yue Wang,Xiaodong Pi,Xiaodong Pi

2023-01-01

Abstract:Silicon (Si) is one of the most important materials for very large-scale integration (VLSI) circuits, which has achieved great success in microelectronics. The advanced mature technology and the low cost of Si have attracted interest for exploring its use in optoelectronic synaptic devices. Si-based heterostructures with rationally designed energy-band alignments pave the way to optoelectronic synaptic devices with a series of advantages such as higher optical sensitivity and lower energy consumption. In this work, we introduce the use of Si-based heterostructures to develop optoelectronic synaptic devices that are based on bulk Si, Si nanomembranes (Si NMs) and Si nanocrystals (Si NCs). The working mechanisms and existing practical applications of these devices are discussed in terms of energy-band alignment. The continuous exploration of Si-based heterostructures contributes to the optoelectronic implementation of neuromorphic systems in the future.
High-Q and High-Order Side-Coupled Air-Mode Nanobeam Photonic Crystal Cavities in Silicon

Ping Yu,Huiye Qiu,Hui Yu,Feiqing Wu,Zhuoyuan Wang,Xiaoqing Jiang,Jianyi Yang

DOI: https://doi.org/10.1109/lpt.2016.2581205

IF: 2.6

2016-01-01

IEEE Photonics Technology Letters

Abstract:We demonstrate the design, fabrication, and characterization of side-coupled airmode nanobeam photonic crystal cavities in silicon-on-insulator platform. Results show that repeatable devices achieve similar high loaded quality factors (>10(4)) and large optical energy ratio in low refractive region. The unload Q-factors of the fabricated cavities are estimated to exceed 10(5). With side-coupled configuration, high transmission of through port is achieved with typical insertion loss less than 0.5 dB. Wavelength shifts of the measured resonances with respect to the designed values are observed and well explained by considering the fluctuation of etching depth. The demonstrated side-coupled airmode nanobeam photonic crystal cavities may find their applications in ultracompact integrated photonics, especially for on-chip photonic sensor, notch filter, or optical switch.
Silicon Nanophotonic Devices For On-Chip Optical Modulation And Switching

Daoxin Dai,Lijia Song,Bingchen Pan

DOI: https://doi.org/10.1109/EDTM50988.2021.9420943

2021-01-01

Abstract:A review is given on our recent progresses in silicon nanophotonic devices for optical modulation and switching, which arc key elements in a photonic networks-on-chip. High-speed on-chip optical modulation is the key to generate high-bit-rate optical signal for high-capacity optical interconnects, while optical switching is vital for realizing reconfigurable photonic systems. Here we give a review for high-speed LiNbO3 optical modulators on silicon and novel silicon photonic switches with low random phase errors.
Silicon Photonic Crystals Towards Optical Integration

Zhi-Yuan Li,Chen Wang,Lin G

DOI: https://doi.org/10.5772/55041

2013-01-01

Abstract:During the past two decades, there have been great interests in developing ways to manip‐ ulate photons at nanoscale, realizing optical integrations, developing smaller, faster, and more efficient optoelectronic devices for the purpose of next-generation optoelectronic technology. Great progresses have been made in exploring photonic crystals (PCs) [1,2], plasmonic structures [3,4], and other nanophotonic devices for applications. However, plasmonic structures always involve some metal cells and are subject to strong energy dissipation and absorption loss in optical frequencies. Since silicon has a large refraction index and low loss in the infrared wavelength, it becomes an important optical material that has been widely used for integrated photonics applications. Meanwhile, silicon dominates microelectronics and this makes the silicon-based optical devices have the advantage to integrate with electronic devices.
Silicon nanophotonics for on-chip light manipulation

Jingshu Guo,Daoxin Dai

DOI: https://doi.org/10.1088/1674-1056/27/10/104208

2018-01-01

Chinese Physics B

Abstract:The field of silicon nanophotonics has attracted considerable attention in the past decade because of its unique advantages, including complementary metal-oxide-semiconductor (CMOS) compatibility and the ability to achieve an ultra-high integration density. In particular, silicon nanophotonic integrated devices for on-chip light manipulation have been developed successfully and have played very import roles in various applications. In this paper, we review the recent progress of silicon nanophotonic devices for on-chip light manipulation, including the static type and the dynamic type. Static onchip light manipulation focuses on polarization/mode manipulation, as well as light nanofocusing, while dynamic on-chip light manipulation focuses on optical modulation/switching. The challenges and prospects of high-performance silicon nanophotonic integrated devices for on-chip light manipulation are discussed.
Subwavelength Structured Silicon Waveguides and Photonic Devices

Lu Sun,Yong Zhang,Yu He,Hongwei Wang,Yikai Su

DOI: https://doi.org/10.1515/nanoph-2020-0070

IF: 7.5

2020-01-01

Nanophotonics

Abstract:Subwavelength structures such as subwavelength gratings (SWGs) and subwavelength metamaterials are capable of tailoring the optical properties of materials and controlling the flow of light at the nanoscale. The effective indices of the subwavelength structured strip and slab waveguides can be changed in a wide range by choosing an appropriate duty cycle or a filling factor of silicon, which provides an effective method to manipulate the optical field and achieve effective index matching for functional devices. Recent advances in nanofabrication techniques have made it possible to implement subwavelength structures in silicon strip and slab waveguides. Here we review various approaches used to design subwavelength structures and achieve exotic optical responses and discuss how these structures can be used to realize high-performance silicon photonic devices. Both one-dimensional SWG devices and two-dimensional subwavelength metamaterial devices are covered in this review, including subwavelength structure-based polarization handling devices, mode manipulation devices, and building blocks for integrated optical interconnects. Perspectives on subwavelength structured silicon photonic devices are also discussed.
Periodic nanohole array structure induced on a silicon surface by direct writing with a femtosecond laser

D. Q. Yuan,Q. R. Wu,J. T. Xu,Ming Zhou,H. F. Yang

DOI: https://doi.org/10.1364/JOT.82.000353

IF: 0.4

2015-01-01

Journal of Optical Technology

Abstract:A regular micro-apparatus covered with periodic nanohole, nanoridge, and ripple structures on silicon bulk (with crystal orientation of 110) was formed by micromachining with a tightly focused beam of a femtosecond laser with a wavelength of 800 nm, a repetition rate of 1 kHz, and a pulse length of 130 fs in air. We used laser direct writing technology to form periodic double-row nanohole structures, and the laser was focused with a 10x focusing objective lens (NA = 0.3). We investigated the relationship between the width of structures and the speed of processing to provide knowledge of the evolution of the nanohole and nanoridge structures. (C) 2015 Optical Society of America.
Nanosecond Laser-Induced Reshaping of Periodic Silicon Nanostructures

Phuong Thi Nguyen,Jina Jang,Seok-Min Kim,Taeseung Hwang,Junyeob Yeo,Costas P. Grigoropoulos,Jung Bin In

DOI: https://doi.org/10.1016/j.cap.2020.12.003

IF: 2.856

2020-01-01

Current Applied Physics

Abstract:We demonstrated the use of laser-induced reshaping to produce periodic silicon nanostructures (PSNs) with different geometries. Periodically located silicon nanostructures were preformed by dry etching of a silicon wafer covered with a monolayer of self-assembled polystyrene nanospheres. These PSNs were reshaped under ambient conditions by irradiation with two kinds of nanosecond lasers (532 nm and 355 nm). The effects of the irradiation parameters on the reshaped geometry were systematically investigated. Vertical growth of the irradiated PSNs resulted from the epitaxial deposition of rich silicon vapor during laser irradiation. However, the growth was limited even with higher laser fluence because of the nanoscale structure, the size of which is smaller than the melting depth induced by the nanosecond lasers. The reshaped PSNs displayed reflection spectra that are tunable by varying the characteristics of reshaping-laser input. This method offers a promising approach for the site-selective fabrication of optically tunable 3D nanostructures.
Silicon Photonics and Its Applications

Zhi-ping ZHOU

DOI: https://doi.org/10.19519/j.cnki.1672-3392.2018.01.002

2018-01-01

Abstract:Silicon Photonics has demonstrated itself as a more efficient and lower cost on-chip optical solution for high speed optical communications,datacenter interconnections,and sensing technology.It is expected that a successful monolithic integration of silicon based photonic devices and microelectronic devices will lead to a significant "micro optoelectronics revolution".This paper will start with an introduction to Silicon Photonics and its short history,then followed by a review on recent progresses in research and development of the devices,integrations,and applications.A future outlook on this new discipline will also be presented.
Amorphous Silicon in Nanophotonic Technology

Lech Wosinski,Liu,Matteo Dainese,Daoxin Dai

2007-01-01

Abstract:Silicon-on-insulator nanowire waveguides appear to be the technology for next generation of super compact integrated devices. Due to a very high refractive index contrast and strong light confineme ...
Low Dimension Structures and Devices for New Generation Photonic Technology

D. H. Zhang,Ding Tang,T. P. Chen,Ting Mei,Xuming Yuan

DOI: https://doi.org/10.1063/1.4878307

2014-01-01

AIP Conference Proceedings

Abstract:Low dimensional structures and devices are the key technological building blocks for new generation of electronic and photonic technology. Such structures and devices show novel properties and can be integrated into systems for wide applications in many areas, including medical, biological and military and advancement of science. In this invited talk, I will present the main results achieved in our competitive research program which aims to explore the application of the mesoscopic structures in light source, manipulation and imaging and integrate them into advanced systems. In the light source aspect, we have for the first time developed graphene mode-locked lasers which are in the process of commercialization. Nanocrystal Si embedded in dielectrics was formed by ion implantation and subsequent annealing. Si light emitting devices with external quantum efficiency of about 2.9×10−3% for visible emission were demonstrated at room temperature and the color of emitted light can be tuned electrically from violet to white by varying the injected current. In light manipulation, loss compensation of surface plasmon polaritons (SPPs) using quantum well (QW) gain media was studied theoretically and demonstrated experimentally. The SPP propagation length was effectively elongated several times through electrical pumping. One and two microring resonators based on silicon on insulator and III-V semiconductors technologies have been successfully fabricated and they can be used as filter and switch in the photonic circuit. In imaging, both SPP and low dimension structures are investigated and resolution far beyond diffraction limit in visible range has been realized. The integration of the components in the three aspects into complicated systems is on the way.

Silicon Nanophotonic Devices Based on Periodic Structures

Multiple-Patterning Nanosphere Lithography for Fabricating Periodic Three-Dimensional Hierarchical Nanostructures.

Silicon Nanophotonic Devices Based on Resonance Enhancement

Silicon-Based Optoelectronics Enhanced by Hybrid Plasmon Polaritons: Bridging Dielectric Photonics and Nanoplasmonics

Silicon-based CMOS Photonic Devices Using Carrier Dispersion Effect

Silicon Photonic Network-on-chip and Enabling Components

Subwavelength Engineering in Silicon Photonic Devices

Development of Silicon Photonic Devices for Optical Interconnects

Silicon Nanophotonics for Light Manipulation.

Study of Silicon Photonics Based on Standard CMOS Foundry

Silicon-based Heterostructures for Optoelectronic Synaptic Devices

High-Q and High-Order Side-Coupled Air-Mode Nanobeam Photonic Crystal Cavities in Silicon

Silicon Nanophotonic Devices For On-Chip Optical Modulation And Switching

Silicon Photonic Crystals Towards Optical Integration

Silicon nanophotonics for on-chip light manipulation

Subwavelength Structured Silicon Waveguides and Photonic Devices

Periodic nanohole array structure induced on a silicon surface by direct writing with a femtosecond laser

Nanosecond Laser-Induced Reshaping of Periodic Silicon Nanostructures

Silicon Photonics and Its Applications

Amorphous Silicon in Nanophotonic Technology

Low Dimension Structures and Devices for New Generation Photonic Technology