Laser Autocollimation Measurement of Small AngleBased on Cross Correlation

黄银国,林玉池,王为,赵美蓉
DOI: https://doi.org/10.3969/j.issn.1672-6030.2010.02.005
2010-01-01
Nanotechnology and Precision Engineering
Abstract:A laser autocollimation measurement system based on optical autocollimation principle was put forward for small angle measurement,using laser diode(LD)as light source and position sensitive detector(PSD)as a laser spot detector.In order to improve the precision,the small angle measurement system adopted cross correlation analysis to modulate LD with sine-wave.Through cross correlation demodulation,the small angle to be measured was then extracted from the output of PSD.The signal processing system for small angle demodulation was designed and some factors influencing the accuracy were discussed.Finally,this paper gave a prototype of laser autocollimation measurement system and its performance tests.The prototype shows high precision and stability for 2-D small angle measurement,with the maximum nonlinear error of 0.6″,the repeatability error of 0.2″ and the drift of 0.4″/4 h within the range of ±150″.
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