2D Micro-Angle Sensor Based on Laser Autocollimation

LIAN Meng-dong,JIN Wei-feng,JU Bing-feng
DOI: https://doi.org/10.3969/j.issn.1001-4551.2010.12.006
2010-01-01
Abstract:In order to solve the problems of measuring surface micro-profile and online measurement of precision platform,a compact two-dimensional micro-angle sensor was designed.The sensor based on the principle of laser autocollimation,was consisted of a laser diode as a light source and a quadrant photodiode as a position-sensing device.The sensitivity of the angle sensor does not rely on the focal length of the objective lens,which makes it probable to realize the compact volume.The quadrant photodiode has two-dimensional position-detecting capability,therefore,the angle sensor can detect two-axis tilt simultaneously.The micro-angle sensor has a dimension of 25×20×13 mm3.The detection range is ±1 200 arcsec and the resolution is 0.1 arcsec.Comparison experiments with an autocollimator were carried out,which testified the validity of the new compact 2D micro-angle sensor.
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