Structures And Tunability Of Ba0.5sr0.5tio3/Bi1.5zn1.0nb1.5o7 Multilayer Thin Films Grown On Pt/Al2o3 Substrates

Xin Yan,Wei Ren,Peng Shi,Xiaoqing Wu,Xiaofeng Chen,Xi Yao
DOI: https://doi.org/10.1080/00150190902892980
2009-01-01
Ferroelectrics
Abstract:Ba0.5Sr0.5TiO3 (BST)/Bi1.5Zn1.0Nb1.5O7 (BZN) multilayer thin films have been prepared on Pt/Al2O3 substrates by a sol-gel method. The multilayer thin films were deposited alternatively by spin coating technique and crystallized by rapid thermal annealing. The structures and morphologies of BST/BZN multilayer thin films were analyzed by XRD and FESEM. The XRD results showed that the perovskite BST phase and the cubic pyrochlore BZN phase can be observed respectively in the multilayer thin films annealed at 700-800 degrees C. The morphology of BST/BZN multilayer films shows that the films are crack-free and have distinct interfaces. The BST/BZN multilayer thin films annealed at 750 degrees C exhibit a moderate dielectric constant around 69, a low loss tangent of 0.007, and a relative tunability of 21% at bias field of 450 kV/cm at 10kHz.
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