Abstract:Capacitive sensors are efficient tools for biophysical force measurement, which is essential for the exploration of cellular behavior. However, attention has been rarely given on the influences of external mechanical and internal electrical interferences on capacitive sensors. In this work, a bionic swallow structure design norm was developed for mechanical decoupling, and the influences of structural parameters on mechanical behavior were fully analyzed and optimized. A bionic feather comb distribution strategy and a portable readout circuit were proposed for eliminating electrostatic interferences. Electrostatic instability was evaluated, and electrostatic decoupling performance was verified on the basis of a novel measurement method utilizing four complementary comb arrays and application-specific integrated circuit readouts. An electrostatic pulling experiment showed that the bionic swallow structure hardly moved by 0.770 nm, and the measurement error was less than 0.009% for the area-variant sensor and 1.118% for the gap-variant sensor, which can be easily compensated in readouts. The proposed sensor also exhibited high resistance against electrostatic rotation, and the resulting measurement error dropped below 0.751%. The rotation interferences were less than 0.330 nm and (1.829 × 10 −7 )°, which were 35 times smaller than those of the traditional differential one. Based on the proposed bionic decoupling method, the fabricated sensor exhibited overwhelming capacitive sensitivity values of 7.078 and 1.473 pF/μm for gap-variant and area-variant devices, respectively, which were the highest among the current devices. High immunity to mechanical disturbances was maintained simultaneously, i.e., less than 0.369% and 0.058% of the sensor outputs for the gap-variant and area-variant devices, respectively, indicating its great performance improvements over existing devices and feasibility in ultralow biomedical force measurement.

A Novel Mems Inertial Sensor with Enhanced Sensing Capacitors

A Novel Triangular-Electrode Based Capacitive Sensing Method for MEMS Resonant Devices

Study of a Novel Micromachined Capacitive Accelerometer

A Stiffness-Tunable MEMS Accelerometer

An In-Plane Low-Noise Accelerometer Fabricated with an Improved Process Flow

Design and Application of a Metal Wet-Etching Post-Process for the Improvement of CMOS-MEMS Capacitive Sensors

Design of a Micro Capacitive Acceleration Sensor Based on MEMS

CMOS-MEMS capacitive tactile sensor with vertically integrated sensing electrode array for sensitivity enhancement

A Capacitive MEMS Inclinometer Sensor with Wide Dynamic Range and Improved Sensitivity

A Novel Tunable Lateral Sensing Capacitive Silicon Micromachined Accelerometer with High Sensitivity

A novel cmos-mems tri-axial tactile force sensor using capacitive and piezoresistive sensing mechanisms

A bionic approach for the mechanical and electrical decoupling of an MEMS capacitive sensor in ultralow force measurement

Design and Fabrication Research on a Capacitive Accelerometer

A Novel Ultra-Thin and High Toughness Piezoelectric Thin Film Sensor Based on MEMS Technology

Design of A Novel CMOS Capacitive Absolute Pressure Sensor

The Design of A Novel MEMS Temperature Sensor

Design and Fabrication of MEMS Acceleration Sensor for Device-Level Vacuum Packaging

An Area-Variant Type MEMS Capacitive Sensor Based on a Novel Bionic Swallow Structure for High Sensitive Nano-Indentation Measurement

A MEMS Micro-g Capacitive Accelerometer Based on Through-Silicon-Wafer-Etching Process

Novel Capacitive Sensing System Design of A Microelectromechanical Systems Accelerometer for Gravity Measurement Applications

A Wafer Level Vacuum Encapsulated Capacitive Accelerometer Fabricated in an Unmodified Commercial MEMS Process