Design of Suspended SU-8 Optical Waveguides for Ultrasmall Bendings

Bo Yang,Zhen Sheng,Dai, Daoxin

DOI: https://doi.org/10.1117/12.852109

2009-01-01

Abstract:The design of small suspended SU-8 optical waveguides is presented. A very small bending radius (∼5µm) can be achieved because of the high-index contrast. A crossing structure is designed and optimized with low loss (≪0.1dB) as the arms to support the suspended waveguides.

What problem does this paper attempt to address?

Waveguide Bends from Nanometric Silica Wires

LM Tong,IY Lou,E Mazur

DOI: https://doi.org/10.1117/12.575598

2005-01-01

Abstract:We propose to use bent silica wires with nanometric diameters to guide light as optical waveguide bend. We bend silica wires with scanning tunneling microscope probes under an optical microscope, and wire bends with bending radius smaller than 5 mu m are obtained. Light from a He-Ne laser is launched into and guided through the wire bends, measured bending loss of a single bend is on the order of 1 dB. Brief introductions to the optical wave guiding and elastic bending properties of silica wires are also provided. Comparing with waveguide bends based on photonic bandgap structures, the waveguide bends from silica nanometric wires show advantages of simple structure, small overall size, easy fabrication and wide useful spectral range, which make them potentially useful in the miniaturization of photonic devices.
Fabrication and Characterization of Small Optical Ridge Waveguides Based on Su-8 Polymer

Bo Yang,Liu Yang,Rui Hu,Zhen Sheng,Daoxin Dai,Qingkun Liu,Sailing He

DOI: https://doi.org/10.1109/jlt.2009.2022285

IF: 4.7

2009-01-01

Journal of Lightwave Technology

Abstract:Small SU-8 ridge optical waveguides with an air cladding and a SiO2 buffer on Si substrate have been realized by using a direct ultraviolet (UV) photolithography technology. The propagation loss measured by the cut-back method is about 0.1 dB/mm (@1550 nm) when the core width is 2.8 mu m. The bending losses of the present SU-8 optical ridge waveguides are also characterized. The measured results show that the bending loss decreases exponentially as the bending radius increases and the total loss can be reduced effectively by introducing an appropriate offset between two connected sections with different curvatures. A small bending radius (as small as 75 mu m) is still allowed for the requirement of a small bending loss (< 0.1 dB) when an offset of 0.1 mu m is introduced. Finally, by using this kind of waveguide, a small 1 x 2 Y-branch power splitter is fabricated and characterized.
Optimizing Design to Optical Waveguide Bend Structure

Jianyi Yang,Minghua Wang

DOI: https://doi.org/10.3321/j.issn:1005-0086.1999.04.006

1999-01-01

Abstract:The loss mechanism of optical waveguide bends was presented, the characteristics of pure bending loss and transition lose were synthesized. An optimizing scheme for the optimization of waveguide bends was proposed based on the requirement of the bend structure function and its curvature. This method can be widely used in optimizing design of various bends. The optimizing procedure is simple and very accurate. The example of using this new scheme to design bends was presented.
Novel Suspended Small SiO2 Ridge Optical Waveguides for Optical Sensing

Pengxin Chen,Yunpeng Zhu,Sailing He,Daoxin Dai

DOI: https://doi.org/10.1364/acpc.2012.ath1b.4

2012-01-01

Abstract:Novel suspended SiO2 ridge optical waveguides on silicon are fabricated and characterized. The propagation loss and the bend loss measured are about 0.385dB/cm and 0.037dB/90° respectively for the fabricated 1μm-wide waveguides with a bending radius of 100μm when operating at 1550 nm.
Ultra Sharp Curved Waveguide Design Based on Topology Optimization

Xiao-Bin Lin,Hong-Tao Lin,Er-Ping Li

DOI: https://doi.org/10.1109/icmmt52847.2021.9618364

2021-01-01

Abstract:This paper presents a topology optimization design method to achieve the inverse design for nanophotonics device. In this paper, we use the direct binary search algorithm (DBS) for inverse design and propose a 90° curved waveguide with an ultra-small bending radius (inner radius, r < 0.1λ0). The transmission rate exceeds 90% in 1380~1465nm, which nearly 10% higher than the traditional design. Furthermore, we design a compact all-optical XOR logic gate in the same method. All designs are compatible with the standard process, which laid the foundation for the development of optical computing and optical neural networks.
SU8 3D Prisms with Ultra Small Inclined Angle for Low-Insertion-loss Fiber/waveguide Interconnection

Minh-Hang Nguyen,Chia-Jung Chang,Ming-Chang Lee,Fan-Gang Tseng

DOI: https://doi.org/10.1364/oe.19.018956

IF: 3.8

2011-01-01

Optics Express

Abstract:This paper presents a simple method for fabricating SU8 three dimensional (3D) prisms with very small inclined-angles for optical-fiber/planar-waveguide interconnection with low insertion-loss by combining self-filling, molding and nano-lithography processes on plane surface. The prisms possess ultra low 3D inclined angle of 0.6° and a small surface roughness of 3.5 nm. It is demonstrated that the transmission efficiency of SOI waveguides improved about 4.6 times at the presence of SU8 prisms with a coupling loss of 11 dB per taper and radiation loss of 2.4 dB per taper.
Modeling and Fabrication of Ge-on-Si3N4 for Low Bend-Loss Waveguides

Wei Li,P. Anantha,Shuyu Bao,Kwang Hong Lee,Xin Guo,Hong Wang,Richard Soref,Chuan Seng Tan

DOI: https://doi.org/10.1109/group4.2016.7739061

2016-01-01

Abstract:Silicon and germanium are waveguide core materials for Si-based Group-IV integrated photonic circuit applications in the mid-infrared (MIR) wavelength range defined here as 2 to 15 um. In particular, Si and Ge are transparent up to 8 and 15 μm respectively, thus offering applications in communications and the sensing of biochemical, medical, and environmental variables [1]. The major problem with the MIR transition is that the most dominant platform of SOI can be used only up to 4 μm due to the high absorption loss of silicon dioxide. Therefore alternative material platforms have to be utilized for longer wavelengths. Presently, the Ge-on-Si platform (known as GOS) has been demonstrated to be workable to 15 μm-thereby offering potential for MIR applications. However, the refractive index contrast between Ge (n=4.1) and Si (n=3.4) is considerably less than that of SOI. As a result, the bend radii in GOS must be considerably larger than those in SOI, causing the footprint of GOS on-chip sensor circuits to be generally larger than those of SOI, an unwanted increase in “real estate.” What is wanted is a better alternative Ge-waveguide platform that will provide a larger core-clad index contrast than GOS as well as useful transparency and smaller channel-bend radii. To achieve those goals, the new structure proposed and realized here is Germanium on Silicon Nitride (Ge-on-Si3N4) which is referred-to here as GON. The refractive index of silicon nitride is 2.4 and it is transparent up to ~7 μm. So the index contrast in GON is 1.7 compared to 0.7 in GOS. Our simulation results show that this structure can provide a more compact integrated network whose bend radii are only a few μm. Most importantly, we have developed a new and practical wafer bonding and layer transfer technique, reported here, to realize GON.
Fabrication and Characterization of Suspended SiO2 Ridge Optical Waveguides and the Devices.

Pengxin Chen,Yunpeng Zhu,Yaocheng Shi,Daoxin Dai,Sailing He

DOI: https://doi.org/10.1364/oe.20.022531

IF: 3.8

2012-01-01

Optics Express

Abstract:Novel suspended SiO(2) ridge optical waveguides on silicon are fabricated and characterized. The present suspended SiO(2) ridge optical waveguide has a SiO(2) ridge core surrounded by air. The propagation loss and the bend loss measured are about 0.385dB/cm and 0.037dB/90° respectively for the fabricated 1 μm-wide waveguides with a bending radius of 100 μm when operating at the wavelength of 1550 nm. With the present suspended SiO(2) optical waveguides, a small racetrack resonator with a radius of 100 μm is also demonstrated and the measured Q-factor is about 3160.
Design and Fabrication of SU-8 Polymer-Based Micro-Racetrack Resonators

Daoxin Dai,Bo Yang,Liu Yang,Zhen Sheng

DOI: https://doi.org/10.1117/12.804181

2008-01-01

Abstract:By using small SU-8 polymer ridge waveguides, compact micro-racetrack resonator (MRR) add-drop filters are presented. This used small ridge waveguide has an air-cladded SU-8 polymer core (n~1.573) on a SiO2 buffer (n~1.445) so that the bending radius could be as small as ~102μm. Considering the resolution limitation of a regular UV-lithography process, the gap in the coupling region of the present MRR in our design is no less than 1.0 μm. In order to enhance the coupling between the access optical waveguide and the micro-racetrack, narrow optical waveguides are used in the coupling regions. Meanwhile, wide optical waveguides are used in the bending sections to have a small bending radius. And a single-side taper is used to connect these two sections with different widths so that the gap width is kept as small as 1.0 μm in the whole region. With a regular UV lithography process, the designed micro-racetrack resonator (MRR) add-drop filters are fabricated. The measured propagation loss for straight waveguides is about 0.1dB/mm and the measured spectral responses of the through/drop ports show a Q-factor of 8000.
Fabrication of single-mode ridge SU-8 waveguides based on inductively coupled plasma etching

Xibin Wang,Jie Meng,Yuanbin Yue,Jian Sun,Xiaoqiang Sun,Fei Wang,Daming Zhang

DOI: https://doi.org/10.1007/s00339-012-7514-1

2013-01-01

Applied Physics A

Abstract:In this paper, a systematic study has been performed for the etching of negative photoresist SU-8 2005 using inductively coupled plasma. The etching rate, vertical profile, surface and sidewall roughness of the waveguide were investigated as a function of the chamber pressure, the bias power, the antenna power, the ratio of flow rate of Ar to O 2 , and the etching time. The etching parameters were studied in detail and optimized to minimize the surface roughness in etched areas. Ridge MZI waveguides with SU-8 2005 were fabricated under the optimized etching conditions, resulting in smooth and almost vertical patterns. The waveguides showed single-mode propagation at 1550 nm wavelength and low propagation loss of less than 1.565 dB/cm, which was similar to the waveguides fabricated by the wet-etching technique.
Suppression of bend loss in writing of three-dimensional optical waveguides with femtosecond laser pulses

Zhengming Liu,Yang Liao,Zhiwei Fang,Wei Chu,Ya Cheng

DOI: https://doi.org/10.48550/arXiv.1802.03461

2018-02-08

Abstract:We provide a solution toward compact and low-loss three dimensional (3D) photonic circuits by femtosecond laser direct writing of 3D waveguides in fused silica. We suppress the bend loss by sandwiching the waveguide between a pair of walls formed by internal modification of glass. Our method allows to reduce the bend loss of a curved waveguide with a bending radius of 15 mm by more than one order of magnitude.

Applied Physics
Compact Microracetrack Resonator Devices Based on Small SU-8 Polymer Strip Waveguides

Daoxin Dai,Bo Yang,Liu Yang,Zhen Sheng,Sailing He

DOI: https://doi.org/10.1109/lpt.2008.2010555

IF: 2.6

2009-01-01

IEEE Photonics Technology Letters

Abstract:Compact microracetrack resonator (MRR) devices are presented with small SU-8 polymer strip waveguides. The SU-8 strip waveguide has an SU-8 polymer core (n~1.573) , a SiO2 buffer (n~1.445), and an air cladding. The fabricated straight waveguide has a low propagation loss of about 0.1 dB/mm. With such a high index-contrast optical waveguide, a compact MRR with a small bending radius (~150 mum) are designed and fabricated. The measured spectral responses of the through/drop ports show a Q-factor of 8000.
Loss Reduction in Sharply Bent Optical Nanofibers by Coupling with Au Nanoparticles

Yuxin Yang,Jue Gong,Yixiao Gao,Xin Guo,Pan Wang,Limin Tong

DOI: https://doi.org/10.1016/j.optcom.2021.127167

IF: 2.4

2021-01-01

Optics Communications

Abstract:Bending losses of sharply bent optical nanofibers or nanowires coupling with Au nanoparticles (Au NPs) are investigated using a finite-difference time-domain (FDTD) method. Relying on the ultra-tight optical confinement of the Au NPs, bending losses of the sharply bent optical nanofibers or nanowires can be effectively reduced by attaching Au NPs to the inner edge of the bent nanofibers or nanowires. At 650-nm wavelength, a bending-loss reduction of 4.7 dB/90° is obtained for a 300-nm-diameter SiO2 nanofiber coupling with seven 140-nm-diameter Au NPs when the bending radius is 1.0 μm. Our results suggest a potential route to realizing sharply-bent optical nanofibers or nanowires with acceptable bending losses for constructing highly compact photonic integrated circuits or devices.
Analysis of deep-etched, single-mode GaAs/GaAlAs optical rib waveguides using discrete spectral index method

Human Ma,Jin Li,Jianyi Yang,Minghua Wang

2000-01-01

Abstract:In this paper, it is presented a detailed theoretical study of the properties of deep-etched GaAs/GaAlAs multiple-layer optical rib waveguides designed using the discretes spectral index method. At last, it is obtained low-loss, single-mode optical rib waveguides with a large mode size. Using this kind of deep-etched rib waveguides with biggest lateral index difference, can raise the performances of MMI devices but also when designing and fabricating bend waveguides and branch structures, it has the advantages of compactness and easy to integration.
Ultra-sharp Multimode Waveguide Bends Based on Superellipse Curves and Shallowly Etched Nanoslots Designed by an Intelligent Algorithm

Tonghui Dou,Song Yue,Yu Hou,Ran Wang,Haiyan Shi,Yuhang Li,Yanming Feng,Zichen Zhang

DOI: https://doi.org/10.1109/jlt.2024.3390994

IF: 4.7

2024-01-01

Journal of Lightwave Technology

Abstract:As an emerging technique, mode division multiplexing (MDM) can effectively increase the data capacity in communication networks. High-performance multimode waveguide bends with small device footprints play an indispensable role in multimode photonics and MDM technique. Previously reported multimode waveguide bends still face the challenge of limited number of supported modes and relatively large device footprint. To tackle these challenges, based on the intelligent inverse design algorithm that combines adaptive genetic algorithm (AGA) and finite element method (FEM) simulation, a kind of multimode waveguide bend based on superellipse curves and shallowly-etched subwavelength nanoslots is proposed in this work. Numerical simulation results confirm that the multimode waveguide bends can support up to 5 TE modes and 8 TE/TM modes (4 TE + 4 TM), whose bending radius is only 3.55 and 3.25 mu m, respectively. All devices can be characterized as ultra-sharp 90 degrees multimode waveguide bends with low loss and low crosstalk. Moreover, this work reconfirms the good generality of our intelligent design methodology, which can be applied to the design and optimization of various photonic devices. Meanwhile, the proposed multimode waveguide bends hold good prospect in application of MDM techniques in multimode silicon photonics.
A Small Polymeric Ridge Waveguide with a High Index Contrast

Rui Hu,Daoxin Dai,Sailing He

DOI: https://doi.org/10.1109/jlt.2008.922207

IF: 4.7

2008-01-01

Journal of Lightwave Technology

Abstract:In this paper, an optimal design of a small polymeric ridge waveguide with a high index contrast is presented. In order to reduce the leakage to the substrate and pure bending losses, the buffer layer of the present waveguide is etched partially. The single-mode condition, the bending characteristics, and the birefringence of the present small polymeric ridge waveguide are also studied. By adjusting the core width and the core height, it is possible to obtain a polarization-insensitive small polymer ridge waveguide. For the bending loss, the numerical results show that the dominant part is the transition loss between the straight and bending sections (other than the pure bending loss) and the transition loss could be reduced greatly by introducing a lateral offset. However, the transition loss is still too large to obtain a very small bending radius (e.g., 10 mum). When only the pure bending loss is necessary to consider in some special case (e.g., microrings without any transitions), one can have a bending radius less than 10 mum due to the possibility of low pure bending loss.
Ultra-compact and efficient photonic waveguide bends with different configurations designed by topology optimization

Sabaina Irfan,Jae-Yong Kim,Hamza Kurt

DOI: https://doi.org/10.1038/s41598-024-53881-9

IF: 4.6

2024-03-19

Scientific Reports

Abstract:Transporting light signals over the corners and sharp bends imposes high optical loss and distortion on the mode profiles. Usually, bends with larger radii are used in circuits to minimize the loss over transmission, resulting in a severe limitation in integration density. In this paper, we propose novel topology-optimized optimized L-bend and U-bend structures designed for a 220 nm silicon-on-insulator (SOI) platform. Optimized L-bends with footprints of 2.5 μm × 2.5 μm, 1.5 μm × 1.5 μm, and 1 μm × 1 μm show maximum insertion losses of only 0.07 dB, 0.26 dB, and 0.78 dB, respectively. For optimized U-bends with footprints of 3 μm × 3.6 μm, 2.5 μm × 2.5 μm, and 1.5 μm × 1.5 μm, the maximum insertion losses are 0.07 dB, 0.21 dB, and 3.16 dB. These optimized bends reduce the maximum insertion loss by over 50% compared to un-optimized arc-type bends across a broad wavelength range of 1450–1650 nm. Experimental verification of a meander line with 16 optimized U-bends (3 μm × 3.6 μm) demonstrates an averaged insertion loss of 1.23 dB in the wavelength range of 1520–1580 nm, agreeing with simulated results and indicating a high potential of loss reduction with optimized bends.

multidisciplinary sciences
SU-8 Optical Waveguides and Devices for the 2μm Wavelength Range

Haifeng Shan,Jingshu Guo,Daoxin Dai

DOI: https://doi.org/10.1117/12.2295252

2018-01-01

Abstract:SU-8 optical waveguides and devices are developed for the 2 μm wavelength range for the potential applications in the future high-capacity optical communications operating at 2 μm. The mode properties of the SU-8 optical waveguides are analyzed numerically. The SU-8 optical waveguides and devices are fabricated with the spin-coating process. The measured propagation losses for the fabricated SU-8 optical waveguides is about 10dB/cm. The demonstrated microring resonator (MRR) has a Q-value of 5000.
Inverse Design of Ultra‐Compact Multimode Waveguide Bends Based on the Free‐Form Curves

Shangsen Sun,Penghui Dong,Fengchun Zhang,Juanli Wang,Ning Zhu,Yaocheng Shi

DOI: https://doi.org/10.1002/lpor.202100162

2021-07-29

Abstract:On-chip mode-division multiplexing (MDM) can increase the transmission capacity of a single optical bus waveguide. It is of great significance for the MDM systems to design the multimode waveguide bends (MWBs) with compact sizes. A method of designing the MWB using the inverse design algorithm is presented in this paper. Ultra-compact MWBs with high performances are realized by changing the curvature radius of the waveguide curve, and the fabrication process only requires a single step photo-lithography and plasma etching. The three-mode bent waveguide with an effective radius of only 9.35 µm is designed and tested. The theoretical excess losses of TE0, TE1, and TE2 mode are less than 0.04 dB in a wide spectral range of 1500 to 1600 nm, and the crosstalks between all guided modes are all less than −29 dB. For the fabricated 90° waveguide bend the measured excess losses are 0.17, 0.04, and 0.16 dB at the central wavelength of 1550 nm, respectively, and the crosstalks between all three modes are less than −21 dB in the wavelength range from 1520 to 1600 nm. The proposed design method can be also extended to more mode-channels.

physics, condensed matter,optics, applied
Low-loss and Low-Crosstalk Multimode Waveguide Bend on Silicon.

Xiaohui Jiang,Hao Wu,Daoxin Dai

DOI: https://doi.org/10.1364/oe.26.017680

IF: 3.8

2018-01-01

Optics Express

Abstract:A low-loss and low-crosstalk multimode waveguide bend is proposed and demonstrated for mode-division-multiplexed optical interconnects. The proposed 90°-bend is composed of two identical 45°-bends, which are defined as modified Euler curves. For the designed 90° Euler-bend with a core width of 2.36 μm for supporting four TM-polarization modes, it is allowed to achieve an effective radius as small as 45 μm, which is about 1/4 of the radius (~175 μm) for a regular 90° arc-bend. In theory, this proposed 90° Euler-bend has very low excess losses (<0.1 dB) and very low inter-mode crosstalks (<-25 dB) over a broad wavelength-band. A silicon photonic integrated circuit is designed, fabricated and characterized by integrating a pair of mode (de)multiplexers and a multimode bus waveguide with a Euler S-bend consisting of two cascaded 90° Euler-bends. The measurement results show that the fabricated Euler S-bend has low excess losses of <0.5 dB and low inter-mode crosstalks of <-20 dB over a broad band from 1520 nm to 1610 nm for all the 4 mode-channels of TM polarization.

Design of Suspended SU-8 Optical Waveguides for Ultrasmall Bendings

Waveguide Bends from Nanometric Silica Wires

Fabrication and Characterization of Small Optical Ridge Waveguides Based on Su-8 Polymer

Optimizing Design to Optical Waveguide Bend Structure

Novel Suspended Small SiO2 Ridge Optical Waveguides for Optical Sensing

Ultra Sharp Curved Waveguide Design Based on Topology Optimization

SU8 3D Prisms with Ultra Small Inclined Angle for Low-Insertion-loss Fiber/waveguide Interconnection

Modeling and Fabrication of Ge-on-Si3N4 for Low Bend-Loss Waveguides

Fabrication and Characterization of Suspended SiO2 Ridge Optical Waveguides and the Devices.

Design and Fabrication of SU-8 Polymer-Based Micro-Racetrack Resonators

Fabrication of single-mode ridge SU-8 waveguides based on inductively coupled plasma etching

Suppression of bend loss in writing of three-dimensional optical waveguides with femtosecond laser pulses

Compact Microracetrack Resonator Devices Based on Small SU-8 Polymer Strip Waveguides

Loss Reduction in Sharply Bent Optical Nanofibers by Coupling with Au Nanoparticles

Analysis of deep-etched, single-mode GaAs/GaAlAs optical rib waveguides using discrete spectral index method

Ultra-sharp Multimode Waveguide Bends Based on Superellipse Curves and Shallowly Etched Nanoslots Designed by an Intelligent Algorithm

A Small Polymeric Ridge Waveguide with a High Index Contrast

Ultra-compact and efficient photonic waveguide bends with different configurations designed by topology optimization

SU-8 Optical Waveguides and Devices for the 2μm Wavelength Range

Inverse Design of Ultra‐Compact Multimode Waveguide Bends Based on the Free‐Form Curves

Low-loss and Low-Crosstalk Multimode Waveguide Bend on Silicon.