Abstract:environments. As a result, we are developing chemical sensors within integrated microfluidic systems for sensitive and selective detection of these pollutants. Our approach is to combine established chemical sensing strategies with microfluidic structures, especially in plastic devices, to achieve a total heavy metal analysis system. In this regard, the combination of three complementary techniques-optical waveguide spectroscopy, electrochemistry and chemical partitioning offers the required selectivity and sensitivity essential for many environmental samples. On-chip optical waveguide spectroscopy promises to yield the necessary high sensitivity but relies on fabrication of optical structures with a material of appropriate refractive index, optical quality, and chemical stability by methods consistent with established fabrication methods. SU-8, the epoxy-based negative photoresist, appears to satisfy these requirements and, thus, has become one of our candidate materials for waveguide fabrication on plastic microchips. Although the SU-8 has been previously used for waveguide fabrication, its optical properties and more specifically the influence of processing conditions on resultant optical properties have not been thoroughly characterized. This work presents an evaluation of SU-8-based multimode waveguides on glass and plastic substrates. Optical constants of waveguides have been characterized by spectroscopic ellipsometric and prism coupling techniques. Additionally, using the latter method, evaluation of propagation losses of various structures with different thicknesses has been made. Ellipsometric and prism coupling measurements gave comparable refractive indices for variously cured SU-8 waveguide materials. Prism coupling analyses proved to be more useful for analysis of the many SU-8 waveguide structures fabricated in the thickness range of 5 to 75 mu m.

SU-8 Optical Waveguides and Devices for the 2μm Wavelength Range

A New Route for Fabricating Polymer Optical Microcavities.

Passive Devices at 2 Μm Wavelength on 200 Mm CMOS-compatible Silicon Photonics Platform [Invited]

SiN-SOI Multilayer Platform for Prospective Applications at 2 Μm

Compact Microracetrack Resonator Devices Based on Small SU-8 Polymer Strip Waveguides

Fabrication of Si/Si1-Xgex Waveguide Wdm Components

Development Status of Optical Waveguided Devices for Mid/Long-wave Infrared Region

Fabrication and Characterization of Small Optical Ridge Waveguides Based on Su-8 Polymer

Characterization of SU-8 Material Based on Substrate Integrated Waveguide Cavities

Silicon-on-Insulator Waveguide Devices for Broadband Mid-Infrared Photonics

Compact microring resonators integrated with grating couplers working at 2 μm wavelength on silicon-on-insulator platform.

High-Q Microring Resonators with 2$\,\times\,$ 2 Angled Multimode Interference Couplers

$2-\Mu$ M Wavelength Grating Coupler, Bent Waveguide, and Tunable Microring on Silicon Photonic MPW

Design, Fabrication and Measurement of A Novel 140 Ghz Folded Waveguide Based on Su-8 Uv-Liga Technology

Long-wave infrared 1 × 2 MMI based on air-gap beneath silicon rib waveguides.

Design and Fabrication of SU-8 Polymer-Based Micro-Racetrack Resonators

Optimization of Deep-Etched,Single-Mode GaAs/GaAlAs Optical Rib Waveguides Using Discrete Spectral Index Method

Characterization and Optimal Design of Silicon-Rich Nitride Nonlinear Waveguides for 2 Μm Wavelength Band

Compact Silicon-Based Wavelength-Selective Photonic Integrated Devices and the Applications

Analysis of deep-etched, single-mode GaAs/GaAlAs optical rib waveguides using discrete spectral index method

Characterization of SU-8 optical multimode waveguides for integrated optics and sensing on microchip devices