Optical and structural properties of Sb and Sb-rich SiSb thin films

Huang Huan,Wang Yang,Gan Fuxi
DOI: https://doi.org/10.1117/12.823427
2009-01-01
Abstract:Sb-rich SiSb thin film was recently reported as a promising phase change meromy material. In this paper, optical and structural properties of as-deposited amouphous and laser-annealed crystalline Sb-rich SiSb thin films are studied and compared with pure Sb thin film. Sb and Si15Sb85 thin films were deposited on polycarbonate substrates by magnetron sputtering. Laser initialization in pure Sb and Si15Sb85 thin films were performed with phase-change optical disc initializer. Reflectivity Spectrum and XRD analysis were performed on as-deposited and initialized Sb and Si15Sb85 thin films. The influence of Si doping on its optical and structural properties are discussed and qualitatively explained by a distorted structure model.
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