Research of close loop control model for electrostatically levitated micro-gyroscope

Liming Wu,Jingxin Dong,Fengtian Han,Yunfeng Liu
2008-01-01
Abstract:An electrostatic levitation system for micro-gyroscope has been adopted to suspend the rotating ring-shaped rotor in electrode chamber center. According to the devised electrostatic force model, five-axis close loop control model for electrostatic levitation system has been built up. The working principles of the levitated gyroscope for measuring acceleration and angular rate have been analyzed, and the digital controlled levitation circuits have been designed. The circuit electric parameters have been determined based on the sensor structure parameter. According to performance indexes of the levitated control system, the controller parameters have been determined by simulation. The dynamic response and suspension rigidities of the close loop levitated system have been analyzed, and the overload capacity has also been evaluated. The frequency sweeping experiments for digital controllers demonstrate that the lag phase caused by digital sampling is not less than 15° at the gain crossover frequency.
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