Nonlinear Optical Properties of Si/SiNx Superlattice

SHEN Ji-wei,GUO Heng-qun,LU Peng,XU Jun,CHEN Kun-ji,WANG Qi-ming
2008-01-01
Chinese Journal of Luminescence
Abstract:In order to study preparation process recipes and nonlinear optical properties of Si/SiNx superla-ttice,Si/SiNx superlattice has been fabricated by RF magnetron sputtering technique and thermal annealing.The superlattice has been characterized by absorption measurement,and X-ray diffraction.Nonlinear optical properties of Si/SiNx superlattice was probed by a Z-scan technique at λ=1 064 nm.The experimental results show that the nonlinear refractive index of the sample is a negative value and the nonlinear absorption is two-photon absorption.The real and imaginary parts of χ(3)have been found to be 1.27×10-7(esu)and 1.51×10-8(esu)according to the experimental data of Z-scan curve.The value of Si/SiNx superlattice is larger 5 scales than that of bulk silicon.The nonlinear mechanism of the material was discussed.The enhancement of non-linear refractive index is mainly attributed to intensive quantum confinement.The results indicate that such Si/SiNx superlattice material could be applied to the optoelectronics and microelectronics industry since it is compatible with Si technology.
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