Third-order optical nonlinear properties of amorphous Si/SiO2 superlattices fabricated by magnetron sputtering

Ning-ning Liu,Jia-ming Sun,Shao-hua Pan,Zheng-hao Chen,Wen-sheng Shi,Rong-ping Wang,Xiao-guang Wang
DOI: https://doi.org/10.1016/S0030-4018(00)00501-0
IF: 2.4
2000-01-01
Optics Communications
Abstract:The nonlinear optical response of amorphous Si/SiO2 superlattices fabricated by magnetron sputtering are studied using the Z-scan technique. The real and imaginary parts of the third-order optical nonlinearity χ(3) have been measured at 532 nm and found to be 6.392×10−7 esu and −9.814×10−7 esu, respectively. The results indicate an enhancement over crystalline silicon and porous silicon, which may be attractive for potential application in electro-optic devices.
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