Effect of the Substrate Temperature on the Property of ZnO Films Deposited by Magnetron Sputtering with DC at the Low Power

蔡利霞,马书懿,李伟,李锡森,李勇

DOI: https://doi.org/10.3321/j.issn:1001-9731.2008.08.013

2008-01-01

Journal of Functional Biomaterials

Abstract:Using the magnetron sputtering with DC at the low power,we have prepared the ZnO films with strong c-axis orientation on Si substrates.We also studied the influence of the substrate temperature on the mi- crostructure and photolumineseence(PL)properties of ZnO thin films by using X-ray diffraction(XRD)and fluorescence spectrometer.The results showed that the desirable substrate temperature promoted the crystalli- zation of the ZnO films.The photoluminescence(PL)spectrum of the samples has been measured at room tem- perature.Blue peak at 440 and 485nm,green peak at 527nm of the films have been observed.With the rise of the growth temperature,the intensity of the blue peak increased sharply.It is concluded that the blue peak lo- cated at about 440nm was mainly attributed to the interstitial Zinc(Zn_i),the blue peak located at about 485nm may correspond to the electron transition from deep oxygen vacancy level to the valence band,and the green e- mission peak located at about 527nm corresponds to the transition from the bottom of the conduction band to the local level composed of oxide misplaced defects.The growth temperature mainly influence the luminescence properties of the ZnO thin films via changing the kind of the defects and concentrations.