Process Research of GaAs PIN/PHEMT Monolithic Integrated Optical Receiver Front End

Zhong FENG,Shilong JIAO,Ou FENG,Lijie YANG,Youquan JIANG,Tangsheng CHEN,Chen CHEN,Yutang YE
DOI: https://doi.org/10.3969/j.issn.1000-3819.2008.04.016
2008-01-01
Abstract:The key processes for monolithic integrated optical receiver front end have been developed based on the 0.5μm GaAs PHEMT technology of Nanjing Electronic Devices Institute. The compatibility of mesa process and PHEMT planar process is solved for mesa corrosion non-uniformity caused by H3PO4 solutions with different concentrations and the photolithography technology of mesa & planar common metallization process. Results show that the processes can fully meet the needs of monolithic design, and the developed monolithic integrated optical receiver front end has relatively clear output eye diagrams for 1 Gb/s and 2.5 Gb/s NRZ pseudorandom binary sequences (PRBS) optical signal.
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