Multiple-Step Error Identification Method of a 2-DOF Precision Positioning Platform

孙立宁,李娟,刘延杰

DOI: https://doi.org/10.3969/j.issn.1672-6030.2008.03.010

2008-01-01

Nanotechnology and Precision Engineering

Abstract:Based on error iterative method and least-square method,a multiple-step error identification method was pre- sented for a 2-DOF precision positioning platform. For the given desired end position,the actual position of driving joints was obtained based on error iterative method,simultaneously, the desired position of driving joints was computed by inverse kinematic equations containing errors to build geometric error identification equations. And then the lease-square method could be used to get all geometric errors contained in kinematic equations. Applying this method,all geometric er- rors and rotation error of z direction of end could be identified, just by measuring position errors of x and y directions of end. Experimental results indicate that the proposed method can effectively compensate position errors of platform in Oxy plane with the absolute position error of the calibrated platform less than 6 μm.