Research of Precision Positioning System Based on Real-time Error Compensation

SUN Li-ning,YAN Zu-gen
DOI: https://doi.org/10.3969/j.issn.1001-2265.2006.01.005
2006-01-01
Abstract:The precision positioning system based on real-time error compensation was presented.The yaw vibration model and method of yaw error measurement was discussed.Based on simulation by finite element analysis,the PZT driven microtable was designed.Experimental results proved that the motion performance of the positioning table was improved by applied the micro-table to compensate yaw error.
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