A Novel Precision Positioning Table Based on Real-Time Yaw Error Compensation

YAN Zu-gen,SUN Li-ning
DOI: https://doi.org/10.3321/j.issn:0367-6234.2009.12.064
2009-01-01
Abstract:The 2-dimensional precision positioning table shows yaw error when moving along axial direction,which severely degrades the performance of the table.A novel precision positioning table based on real-time yaw error compensation is presented in the paper.Based on micro-displacement measuring technique,the yaw error measurement model of the novel table is established.By adopting the theory of Hertz contact,the rigidity model of the linear ball guideway and the yaw vibrational model of the macro-table are molded.The experimental result proves the validity of the yaw vibration model of the table.The performance of the precision positioning table is improved greatly by adopting micro-driven table to compensate the yaw error of the macro-table in real time.
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