Optimum Design of 2D Micro-Angle Sensor

Qinggang Liu,Heng Zhao,Xiaona Lou,Ningchuan Jiang,Xiaotang Hu
DOI: https://doi.org/10.1117/12.819545
2008-01-01
Abstract:To improve dynamic measurement performance and resolution, an optimum design on two-dimensional (2D) micro-angle sensor based on optical internal-reflection method via critical-angle refractive index measurement is presented in the paper. The noise signals were filtered effectively by modulating laser-driven and demodulating in signal proceeding. The system's accuracy and response speed are improved further by using 16-bit high-precision AD converter and MSP430 CPU which present with a high-speed performance during signals processes such as fitting angle-voltage curve through specific arithmetic, full range and zero point calibration, filter, scaling transformation etc. The experiment results indicated that, dynamic signal measurement range can be up to ±600arcsec, the measurement resolution can be better than 0.1arcsec, and the repeatability could be better than ±0.5arcsec.
What problem does this paper attempt to address?