Abstract:The machining of ultra-smooth surfaces has always been a significant research topic in the fields of optics fabrication. In this paper, disc hydrodynamic polishing (DHDP) process with a novel polishing tool is proposed to produce ultra-smooth surface with sub-nanometer scale surface roughness (Ra < 1 nm) and undamaged sub-surface. In order to explore the principle of the ultra-smooth surface generation in the DHDP process, the material removal mechanism and evolution mechanism of micro-morphology of polished surface were firstly studied by preliminary experiments. Then, theoretical material removal and surface simulation modeling are established on the basis of computational fluid dynamics (CFD), fractal theory for rough surfaces, particle contact mechanics, and erosion mechanisms in DHDP. Finally, a series of polishing experiments was performed on fused quartz glass to verify the theoretical model, which could be applied to predict surface topography and guide the ultra-smooth surface polishing process. The results indicated that the peak-to-valley (PV) value and waviness of the workpiece were reduced in the nanometer level under the erosion action of abrasive particles. Moreover, the surface roughness Ra and PV values decreased with the increase of rotation speed and polishing time. The analysis of power spectral density (PSD) results illustrates that high rotation speed of tool and polishing time (less than 60 min) can reduce the high-spatial-frequency errors distinctly, and the longer polishing time (above 60 min) can also influence on the mid-spatial-frequency errors.

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Modeling and experimenting of disc hydrodynamic polishing process for ultra-smooth surfaces

Influence of the Shape of Polishing Tools on the Surface Roughness in Magneto-rheological Finishing

Study on Experiments of Nano-Abrasive Polishing in Hydrodynamic Suspension Liquid

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Influences of polishing tool's shape on surface roughness in magneto-rheological finishing

Cfd Modelling of A Novel Hydrodynamic Suspension Polishing Process for Ultra-Smooth Surface with Low Residual Stress

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Research on the Hydrodynamic Electro-Chemical Mechanical Polishing for Silicon Wafer with Suspension Fluid

Research on Material Removal Characteristics of Nanoparticle Colloid Jet Machining

Figuring of an ultra-smooth surface in nanoparticle colloid jet machining

An Experimental Study of the Nanoparticle Colloid Hydrodynamic Cavitation Jet Polishing Performance under Different Nozzle Designs

Fluid Pressure and Its Effect on Hydrodynamic Suspension Ultra-Smooth Machining

Experimental Study Of The Polishing Technology With Suspended-Powder Working-Fluids

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