Effects of surface microtopography on material removal and ultra-smooth surface creation processes in ultraviolet-induced nanoparticle colloid jet machining

Xiaozong Song,Yanjiang Niu,Gui Gao
DOI: https://doi.org/10.1016/j.colsurfa.2022.129161
2022-09-05
Abstract:Ultraviolet-induced nanoparticle colloid jet machining is a damage-free ultra-smooth surface polishing technology, which can realize atomic level material removal by utilizing the interface reaction between workpiece surface and nanoparticles in colloid jet beam under the catalysis of ultraviolet (UV) light. Due to the difference of chemical activity of atoms at different microstructures (2 nanoparticle and Si 2 nanoparticle is the most likely to occur, and the 2 nanoparticle being chemically bonded on the Si surface, the atoms on the
chemistry, physical
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