(In,Ga)N/Gan Microcavities With Double Dielectric Mirrors Fabricated By Selective Removal Of An (Al,In)N Sacrificial Layer

Francesco Rizzi,Paul R. Edwards,Katarzyna Bejtka,Fabrice Sèmond,Xiangning Kang,Guoyi Zhang,Erdan Gu,Martin D. Dawson,Ian M. Watson,Robert W. Martín
DOI: https://doi.org/10.1063/1.2712786
IF: 4
2007-01-01
Applied Physics Letters
Abstract:Comparable microcavities with 3 lambda/2 (similar to 240 nm) active regions containing distributed (In,Ga)N quantum wells, grown on GaN substrates and bounded by two dielectric mirrors, have been fabricated by two different routes: one using laser lift-off to process structures grown on GaN-on-sapphire templates and the second using freestanding GaN substrates, which are initially processed by mechanical thinning. Both exploit the properties of an Al0.83In0.17N layer, lattice matched to the GaN substrate and spacer layers. In both cases cavity quality factors > 400 are demonstrated by measurements of the cavity-filtered room-temperature excitonic emission near 410 nm. (c) 2007 American Institute of Physics.
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