Study on Application of Carbon Nanotubes in Micro-electrodes for MEMS

Xing WEI,Zhong-yu HOU,Dong XU,Ya-fei ZHANG,Bing-chu CAI
2007-01-01
Abstract:Screen printing was used to form carbon nanotube films(CNTF) on the metal substrate after carbon nanotubes were made into slurry liquid,then the surface resistance and the roughness of the films were measured by the four point probe meter and the profile meter,respectively.The results show that the CNTF exhibits a high conductivity and low roughness when it was formed by the procedure of which carbon nanotubes were firstly mixed with organic solvent by the proportion of 10%-12%(wt) carbon nanotubes after they were gone through ball milled for 1h,and then the formed slurry was coated on the substrate by screen printing to form film and the film was dried in a vacuum oven at 100 ℃ for 1h,and the film was finally sintered at 350 ℃ for 40 min.According to the results,the technical parameters have been optimized and the micro-electrodes of carbon nanotubes for MEMS were fabricated by the micro-fabrication technology.
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