Abstract:Summary form only given. Experiments on individual nanoparticles are generally difficult but can be carried out by the techniques of modern in-situ electron microscopy. With the continuous improvement of in situ techniques inside transmission electron microscope (TEM), the capabilities of TEM extend beyond structural characterization to high-precision nanofabrication and property measurement, which not only enriches the experimental methods of nanoresearch, but also provides new opportunities for the development in nanoscience and nanotechnology. Based on the idea of “setting up a nanolab inside a TEM”, we review our recent progress in atomic resolution nanofabrication and dynamic characterization of structure and properties of nanomaterials. The electron beam can be used as a tool to induce nanofabrication on an atomic scale. Selective irradiation of MWNTs with a focused electron beam can induce changes of their shape such as cutting, bending, welding and drilling a hole on them. In addition, metal crystals can be encapsulated inside graphitic nanocontainers that were designed for in-situ electron irradiation experiments. Under irradiation, the carbon shells contract and lead to compressive forces. By measuring the lattice spacings in HRTEM images of metal crystals inside graphitic shells, pressures on the order 10-20 GPa were determined. Non-hydrostatic pressure, e.g., inside collapsing nanotubes, may deform the crystals considerably. This can be used for studying the deformation behaviour of individual nanometer-sized crystals. Fig. 1 shows how a Co wire inside a carbon nanotube is deformed and extruded when the the nanotube collapses locally under electron irradiation. Another deformation cell, allowing the detailed study of crystal deformation, was designed by electron-beam structuring, as shown in Fig. 2. A 'carbon onion', encapsulating a Au crystal, was punctured by a fully focused electron beam and subsequently exposed to uniform irradiati- n so that the Au crystal was slowly extruded through the hole. The interaction between metal and carbon was also studied on an atomic scale by introducing Au and Pt atoms into graphene layers. Individual Au or Pt atoms were observed by HRTEM at different temperatures and their migration was monitored. Fig. 3 shows drilling a Snm-diameter hole by electron beam on graphene for third-generation gene sequencing. The mechanism of electron-beam induced high-resolution nanofabrication was also discussed.

Carbon nanotube nanoelectronic devices compatible with transmission electron microscopy.

Self-marked preparation of site-specific transmission electron microscope lamellae of nanodevices using focusing ion beam technique.

High-Resolution Transmission Electron Microscopy Imaging Of Carbon Nanostructures

Carbon Nanotube Displays

Fabrication of Carbon Nanotubes on Interdigitated Metal Electrode for Switchable Nanophotonic Devices

Carbon Nanotube Technology For Solid State And Vacuum Electronics

Fabrication and electrical characteristics of carbon nanotube-based microcathodes for use in a parallel electron-beam lithography system

Using Nanoscale Thermocapillary Flows to Create Arrays of Purely Semiconducting Single-Walled Carbon Nanotubes

Carbon Nanotubes As Field Emission Sources

Single electron tunneling through high-Q single-wall carbon nanotube NEMS resonators

Integration of a carbon nanotube based electrode in silicon microtechnology to fabricate electrochemical transducers

DNA-directed nanofabrication of high-performance carbon nanotube field-effect transistors

Nanoimprint Lithography for Next-Generation Carbon Nanotube-Based Devices

The fabrication of nanoelectrodes based on a single carbon nanotube.

Study of Carbon Nano-Tube Photo-electronic Devices by Nano-Imprint Lithography

Fabrication of Nitrogen-doped Multi-walled Carbon Nanotube and Their Field Effect Transistor Properties

Atomic resolution nanofabrication and dynamic characterization.

Fabrication of Metal Nanoscale Devices on Insulating Membranes by High-Resolution Atom Ablation

Superaligned carbon nanotube grid for high resolution transmission electron microscopy of nanomaterials.

A Novel Experimental Approach to Compatible Carbon Nanofiber Diffusion Around Circular Carbon Micro-Post Surfaces

Fabrication and Electrical and Mechanical Properties of Carbon Nanotube Interconnections