Abstract:This paper presents a novel class of miniature fluxgate magnetometers fabricated on a print circuit board (PCB) substrate and electrically connected to each other similar to the current "flip chip" concept in semiconductor package. This sensor is soldered together by reversely flipping a 5 cm × 3 cm PCB substrate to the other identical one which includes dual magnetic cores, planar pick-up coils, and 3-D excitation coils constructed by planar Cu interconnections patterned on PCB substrates. Principles and analysis of the fluxgate sensor are introduced first, and followed by FEA electromagnetic modeling and simulation for the proposed sensor. Comprehensive characteristic experiments of the miniature fluxgate device exhibit favorable results in terms of sensitivity (or "responsivity" for magnetometers) and field noise spectrum. The sensor is driven and characterized by employing the improved second-harmonic detection technique that enables linear V-B correlation and responsivity verification. In addition, the double magnitude of responsivity measured under very low frequency (1 Hz) magnetic fields is experimentally demonstrated. As a result, the maximum responsivity of 593 V/T occurs at 50 kHz of excitation frequency with the second harmonic wave of excitation; however, the minimum magnetic field noise is found to be 0.05 nT/Hz(1/2) at 1 Hz under the same excitation. In comparison with other miniature planar fluxgates published to date, the fluxgate magnetic sensor with flip chip configuration offers advances in both device functionality and fabrication simplicity. More importantly, the novel design can be further extended to a silicon-based micro-fluxgate chip manufactured by emerging CMOS-MEMS technologies, thus enriching its potential range of applications in modern engineering and the consumer electronics market.

A CMOS Magnetic Sensor Based on Synchronous Sampling Function

A CMOS Magnetic Sensor Integrated Circuits Based on the Synchronized Sampling Function of Sector MAGFET

Design of CMOS magnetic sensor integrated circuit

A CMOS Sectorial Split-Drain Magnetic Sensor IC

Cmos Magnetic Sensor Integrated Circuit with Sectorial Magfet

Compatible CMOS Sensor IC of Magnetic Sensor and Photoelectric Quadrants Sensor

A Broadband NMR Magnetometer System with Field Searching and Automatic Tuning Function

Sector Split-Drain Magnetic Field-Effect Transistor Based on Standard CMOS Technology

A study on relative sensitivity of sector split-drain magnetic field-effect transistor based on standard CMOS technology

A CMOS Front-End Hall Sensor Microsystem for Linear Magnetic Field Measurement With Best Tradeoff Between Sensitivity and SNR

A novel CMOS magnetic field sensor array

An Array Cmos Magnetic-Field Sensor

A highly sensitive CMOS digital Hall sensor for low magnetic field applications

Study of A Three-Axis Digital Tunneling Resistance-Type Magnetic Sensor

Design and Measurement of Microelectromechanical Three-Axis Magnetic Field Sensors Based on the CMOS Technique

A CMOS Hall sensor modeling with readout circuitry and microcontroller processing for magnetic detection

An Oscillator-Based Cmos Magneto-Sensitive Biosensor with In-Situ Switched Capacitor Calibration Scheme

Sagnac Magnetic Field Sensor Based on Sinusoidal Modulation and Empirical Mode Decomposition

High-sensitivity low-noise miniature fluxgate magnetometers using a flip chip conceptual design

Development of Multi-Axes CMOS-MEMS Resonant Magnetic Sensor Using Lorentz and Electromagnetic Forces

An Oscillator-Based CMOS Magneto-Sensitive Biosensor with a Low Noise and Low Temperature Coefficient LDO Regulator